한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

힘 및 변위 감지기구를 적용한 초정밀 가공시스템 개발

Development of an Ultra Precision Machining System Using a Force and Displacement Sensing Module

  • 방진혁 (한양대학교 대학원 정밀기계공학과) ;
  • 권기환 (한양대학교 대학원 정밀기계공학과) ;
  • 조남규 (한양대학교 기계정보경영공학부)
  • 발행 : 2005.12.01
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초록

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

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참고문헌

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