한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제24권1호
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  • Pages.71-78
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  • 2007
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

미세입자 분사가공에서 SU-8 마스크의 특성

Characteristics of SU-8 Mask for Abrasive Jet Machining

  • 고태조 (영남대학교 기계공학부) ;
  • 박동진 (영남대학교 대학원 기계공학과) ;
  • 김희술 (영남대학교 기계공학부)
  • 발행 : 2007.01.01
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초록

Abrasive jet machining (AJM) has been traditionally used for removing rusts or paints. Nowadays, this is promising technology for micro bulk machining where brittle substrate materials are used. In order to get accurate details, masks such as metal, polymer or elastomer is inevitable. Among them, photo polymer which is sensitive to the light has been attractive for it's high accuracy using photolithography. In this research, SU-8 as a photo polymer is used since it is adequate for making thick mask. So, this paper describes how to make AJM masks using SU-8 with a photolithography process, and investigates the characteristics of SU-8 masks during AJM process. Also, an example of fabrication using AJM was shown.

키워드

참고문헌

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