Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 6 Issue 4
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- Pages.5-9
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- 2007
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- 1738-2270(pISSN)
Study on Property Variations of $CoSi_2$ Electrode with Its Preparation Methods
$CoSi_2$ 전극 구조의 증착법에 따른 특성 변화 연구
- Nam, Hyoung-Gin (Division of Electronic Engineering, Sun Moon University)
- 남형진 (선문대학교 전자공학부)
- Published : 2007.12.30
Abstract
Phase transition and dopant redistribution during silicidation of