Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
권호 표지
DOI QR코드

DOI QR Code

Growth of vertically aligned Zinc Oxide rod array on patterned Gallium Nitride epitaxial layer

패턴된 GaN 에피층 위에 ZnO 막대의 수직성장

  • Choi, Seung-Kyu (School of Advanced Materials Engineering, Kookmin university) ;
  • Yi, Sung-Hak (School of Advanced Materials Engineering, Kookmin university) ;
  • Jang, Jae-Min (School of Advanced Materials Engineering, Kookmin university) ;
  • Kim, Jung-A (School of Advanced Materials Engineering, Kookmin university) ;
  • Jung, Woo-Gwang (School of Advanced Materials Engineering, Kookmin university)
  • 최승규 (국민대학교 신소재공학과) ;
  • 이성학 (국민대학교 신소재공학과) ;
  • 장재민 (국민대학교 신소재공학과) ;
  • 김정아 (국민대학교 신소재공학과) ;
  • 정우광 (국민대학교 신소재공학과)
  • Published : 2007.05.27
Download PDF
⟨ Previous Next ⟩

Abstract

Vertically aligned Zinc Oxide rod arrays were grown by the self-assembly hydrothermal process on the GaN epitaxial layer which has a same lattice structure with ZnO. Zinc nitrate and DETA solutions are used in the hydrothermal process. The $(HfO_2)$ thin film was deposited on GaN and the patterning was made by the photolithography technique. The selective growth of ZnO rod was achieved with the patterned GaN substrate. The fabricated ZnO rods are single crystal, and have grown along hexagonal c-axis direction of (002) which is the same growth orientation of GaN epitaxial layer. The density and the size of ZnO rod can be controlled by the pattern. The optical property of ordered array of vertical ZnO rods will be discussed in the present work.

Keywords

References

  1. M. Razeghi, M. Henini, 'Optoelectronic Device:III-Nitride,' pp. 9-22 (2004)
  2. W.-G. Jung. S.-H . Jung. Patrick Kung, and Manijeh Razeghi, Nanotechnology. 17, 54 (2006) https://doi.org/10.1088/0957-4484/17/1/010
  3. Won Il Park and Gyu-Chul Yi. Adv. Mater., 16. No.1, 87 (2004) https://doi.org/10.1002/adma.200305729
  4. S.-H. Yi, J.-M. Jang, S.-K. Choi, J.-A. Kim and WooGwang Jung. Solid State Phenomena, 124-126. 587 (2007) https://doi.org/10.4028/www.scientific.net/SSP.124-126.587
  5. A. Fisher. H. Kuhne and H. Richter, Phys. Rev. Lett., 73. 2712 (1994) https://doi.org/10.1103/PhysRevLett.73.2712
  6. S. Strite and H. Morkoc, J. Vac. Sci. Tech. B., 10, 1237 (1992) https://doi.org/10.1116/1.585897
  7. H. J. Fan, F. Fleischer, W. Lee, K. Nielsch, R. Scholz, m. Zacharias, U. Gosele , A. Dadgar and A. Krost , Superiattice and Microstructures. 36, 95 (2004) https://doi.org/10.1016/j.spmi.2004.08.028
  8. H. P. Maruska and J. J. Tietjen. Appl. Phys. Lett., 15. 327 (1969) https://doi.org/10.1063/1.1652845