Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Fabrication and Characterization of Pyrolyzed Carbon for Use as an Electrode Material in Electrochemical Biosensor

전기화학 바이오센서의 전극물질로 응용을 위한 열분해 탄소의 제작 및 특성 연구

  • 이정아 (한국과학기술원 기계공학과) ;
  • 황성필 (한국과학기술원 화학과) ;
  • 곽주현 (한국과학기술원 화학과) ;
  • 박세일 (한국표준과학연구원 전략기술연구부) ;
  • 이승섭 (한국과학기술원 기계공학과) ;
  • 이광철 (한국표준과학연구원)
  • Published : 2007.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents the fabrication and characterization of carbon films pyrolyzed with various photoresists for bioMEMS applications. To verify the usefulness of pyrolyzed carbon films as an electrode material in an electrochemical biosensor developed by the authors, interactions between avidin and biotin on the pyrolyzed carbon film were studied via electrochemical impedance spectroscopy based on electrostatic interactions between avidin and negatively-charged ferricyanide. The pyrolyzed carbon films were characterized using a surface profiler, a precision semiconductor parameter analyzer, a nanoindentor, scanning electron microscopy, and atomic force microscopy. Amine conjugated biotin was immobilized on the electrode using EDC/NHS as crosslinkers after $O_2$ plasma treatment to enhance functional groups on the carbon electrode pyrolyzed at $1000^{\circ}C$ with AZ9260. The detection of avidin binding with different concentrations in a range of 0.75 nM to $7.5\;{\mu}M$ to the pyrolyzed carbon electrode modified with biotin was carried out by measuring the electrochemical impedance change. The results show that avidin binds to the biotin on the electrode not by non-specific interaction but by specific interaction, and that EIS successfully detects this binding event. Pyrolyzed carbon films are a promising material for miniaturization, integration, and low-cost fabrication in electrochemical biosensors.

Keywords

References

  1. Alfonta, L., Singh, A. K. and Willner, I., 2001, 'Liposomes Labeled with Biotin and Horseradish Peroxide: a Probe for the Enhanced Amplification of Antigen-Antibody or Oligonucleotide-DNA Sensing Processes by the Precipitation of an Insoluble Product on Electrodes,' Anal. Chem. 73, pp. 91-102 https://doi.org/10.1021/ac000819v
  2. Ghica, M. E. and Brett, C. M. A., 2005, 'A Glucose Biosensor Using Methyl Viologen Redox Mediator on Carbon Film Electrodes,' Anal. Chim. Acta 532, pp. 145-151 https://doi.org/10.1016/j.aca.2004.10.058
  3. Isbir, A. A., Solak, A. O., Ustundag, Z., Bilge, S. and Kilic, Z., 2006, 'Preparation and Characterization of Diethylene Glycol Bis(2-aminophenyl) Ether-Modified Glassy Carbon Electrode,' Anal. Chim. Acta 573-574,pp.26-33 https://doi.org/10.1016/j.aca.2006.03.056
  4. Ranganathan, S., McCreery, R., Majji, S. M. and Madou, M. J., 2000, 'Photoresist-Derived Carbon for Microelectromechanical Systems and Electrochemical Applications,' J. Electrochem. Soc. 147(1), pp. 277-282 https://doi.org/10.1149/1.1393188
  5. Schueller, O. J. A., Brittain, S. T. and Whitesides, G. M., 1999, 'Fabrication of Glassy Carbon Microstructures by Soft Lithography,' Sens. Actuators A 72, pp. 125-139 https://doi.org/10.1016/S0924-4247(98)00218-0
  6. Park, B. Y., Taherabadi, L., Wang, C., Zoval, J. and Madou, M. J., 2005, 'Electrical Properties and Shrinkage of Carbonized Photoresist Films and the Implications for Carbon Microelectromechanical Systems Devices in Conductive Media,' J. Electrochem. Soc. 152(12), pp. J136-J143 https://doi.org/10.1149/1.2116707
  7. Konishi, S., Liger, M., Harder, T. A. and Tai, Y. C., 2004, 'Parylene-pyrolyzed Carbon for MEMS Applications,' In: Proc. of 17th IEEE Int. Con! on Micro Electro Mechanical Systems (MEMS2004), pp. 161-164
  8. Konishi, S., Nagae, H., Sagawa, T., Naka, K. and Yoshioka, K., 2005, 'Semiconductivity of Pyrolyzed Polymer for MEMS Applications,' In: Proc. of 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducer2005), pp. 271-274
  9. Kostecki, R., Schnyder, B., Alliata, D., Song, X., Kinoshita, K. and Kotz, R., 2001, 'Surface Studies of Carbon Films from Pyrolyzed Photoresist,' Thin Solid Films 396, pp. 36-43 https://doi.org/10.1016/S0040-6090(01)01185-3
  10. Kim, J., Song, X., Kinoshita, K., Madou, M. J. and White, R., 1998, 'Electrochemical Studies of Carbon Films from Pyrolyzed Photoresist,' J. Electrochem. Soc. 145(7), pp. 2314-2319 https://doi.org/10.1149/1.1838636
  11. Lee, J. A, Lee, S. S., Lee, K.-C., Park, S. I., Woo, B.-C. and Lee, J.-O., 2007, 'Biosensor Utilizing Resist-Derived Carbon Nanostructures,' Appl. Phys. Lett. 90,264103 https://doi.org/10.1063/1.2752719