Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Fabrication of Ceramic-based Passive Mixers for Microfluidic Application by Thick Film Lithography

후막리소그라피를 이용한 세라믹기반의 미세유체소자용 수동형 혼합기의 제조

  • Choi, Jae-Kyung (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Yoon, Young-Joon (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Lim, Jong-Woo (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Kim, Hyo-Tae (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Koo, Eun-Hae (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology) ;
  • Choi, Youn-Suk (Kyungwon Tech Inc.) ;
  • Lee, Jong-Heun (Department of Materials Science & Engineering, Korea University) ;
  • Kim, Jong-Hee (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology)
  • 최재경 (요업기술원 융복합기술본부 융합기술팀) ;
  • 윤영준 (요업기술원 융복합기술본부 융합기술팀) ;
  • 임종우 (요업기술원 융복합기술본부 융합기술팀) ;
  • 김효태 (요업기술원 융복합기술본부 융합기술팀) ;
  • 구은회 (요업기술원 융복합기술본부 융합기술팀) ;
  • 최윤석 ((주)경원테크) ;
  • 이종흔 (고려대학교 신소재공학과) ;
  • 김종희 (요업기술원 융복합기술본부 융합기술팀)
  • Published : 2008.11.30
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Abstract

Microfluidic device can be applied in a wide range of chemical and biological technology. In this paper, ceramic-based T-type passive mixers for microfluidic applications were fabricated by LTCC process combined with thick film photolithography. The base ceramic material in thick film was amorphous cordierite $((Mg,Ca)_2Al_4Si_5O_{18})$ and photoimageable polymers were added to give a photosensitivity. Two types of passive mixer, which showed the channel width of 1.0 mm and $200{\mu}m$, respectively, were designed considering mixing efficiency in the channel and their microfluidic properties were discussed in detail.

Keywords

References

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