한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제25권3호
  • /
  • Pages.63-72
  • /
  • 2008
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

시간최적제어기법을 이용한 정전부상시스템에 관한 연구

Electrostatic Suspension System Using Time Optimal Control

  • 전종업 (울산대학교 기계자동차공학부) ;
  • 백봉우 (울산대학교 대학원 기계자동차공학과) ;
  • ;
  • 박규열 (울산대학교 기계자동차공학부)
  • 발행 : 2008.03.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A new method for the electrostatic suspension of disk-shaped objects is proposed which is based on a time-optimal control scheme and deploys only high-voltage power supplies that can deliver dc voltages of positive and/or negative polarity. This method possesses the unique feature that no high-voltage amplifiers are needed which leads to a remarkable system simplification and objects can be suspended stably even in vacuum environment. Using this scheme, an aluminium disk used in a 3.5-inch HDD was suspended stably at an airgap of 0.3mm.

키워드

참고문헌

  1. Brandt, E. H., "Levitation in Physics," Science, Vol. 243, No. 4889, pp. 349-354, 1989 https://doi.org/10.1126/science.243.4889.349
  2. Knoebel, H. W., "The Electric Vacuum Gyro," Control Engineering, Vol. 11, pp. 70-73, 1964
  3. Kumar, S., Cho, D. and Carr, W. N., "Experimental Study of Electric Suspension for Microbearings," IEEE/ASME J. Microelectromechanical Systems, Vol. 1, No. 1, pp. 23-30, 1992 https://doi.org/10.1109/84.128052
  4. Rhim, W. K., Chung, S. K., Barber, D., Man, K. F., Gutt, G., Rulison, A. and Spjut, R. E., "An Electrostatic Levitator for High-Temperature Containerless Materials Processing in 1-g," Review of Scientific Instruments, Vol. 64, No. 10, pp. 2961-2970, 1993 https://doi.org/10.1063/1.1144475
  5. Jin, J., Higuchi, T. and Kanemoto, M., "Electrostatic Silicon Wafer Suspension," Proc. 4th Int. Symp. Magnetic Bearings, pp. 343-348, 1994
  6. Jeon, J. U., Jin, J. and Higuchi, T., "Electrostatic Suspension of 8-inch Silicon Wafer," Proc. Inst. Electrostat. Jpn., Vol. 21, No. 2, pp. 62-68, 1997
  7. Jin, J., Yih, T. C., Higuchi, T. and Jeon, J. U., "Direct Electrostatic Levitation and Propulsion of Silicon Wafer," IEEE Trans. Industry Applications, Vol. 34, No. 5, pp. 975-984, 1998 https://doi.org/10.1109/28.720437
  8. Jeon, J. U. and Higuchi, T., "Electrostatic Suspension of Dielectrics," IEEE Trans. Industrial Electronics, Vol. 45, No. 6, pp. 938-946, 1998 https://doi.org/10.1109/41.735338
  9. Jeon, J. U., Jin, J. and Higuchi, T., "Rotary Actuators with Electrostatic Suspension," Proc. 5th Int. Symp. Magnetic Bearings, pp. 411-418, 1996
  10. Jeon, J. U., Park, K.Y. and Higuchi, T., "Contactless Suspension and Transportation of Glass Panels by Electrostatic Forces," Sensors and Actuators A, Vol. 134, Issue 2, pp. 565-574, 2007 https://doi.org/10.1016/j.sna.2006.05.016
  11. Jeon, J. U. and Lee, S., "Electrostatic Suspension System of Silicon Wafer using Relay Feedback Control," Journal of the Korean Society for Precision Engineering, Vol. 22, No. 10, pp. 56-64, 2005
  12. Ogata, M., "Modern Control Engineering," Prentice-Hall Inc., pp. 771-778, 1970
  13. Jeon, J. U., Park, K. T. and Park, K. Y., "A Measurement Apparatus of Lateral Restoring Force Exerted on Electrostatically Suspended Object," Journal of the Korean Society for Precision Engineering, Vol. 22, No. 2, pp. 60-69, 2005