Journal of the Korean Society for Nondestructive Testing (비파괴검사학회지)

The Korean Society for Nondestructive Testing (한국비파괴검사학회)
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Magnetic Bio-Sensor Using Planar Hall Effect

평면홀 효과를 이용한 자기 바이오센서

  • Published : 2008.10.30
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Abstract

The magnetic bio-sensor used the PHR (planar hall resistance) effect generated by the free layer in spin-valve giant magnetoresistance structure of Ta/NiFe/CoFe/Cu/NiFe/IrMn/Ta. The PHR element with micrometer size was fabricated through the photolithograph and dry etching process. The PHR signal with magnetic field was measured under the conditions of with and without single magnetic bead. A single magnetic bead of diameter $2.8\;{\mu}m$ was successfully detected using the PHR sensor. Therefore, the high resolution PHR sensor can be applied to bio-sensor application utilizing the output voltage variation of the PHR signals in the presence and absence of a single magnetic bead.

스핀밸브 GMR(giant magnetoresistance) 구조를 갖는 Ta/NiFe/CoFe/Cu/NiFe/IrMn/Ta재료의 자유층에 의한 PHR (planar hall resistance) 특성을 이용한 자기 바이오센서를 제작하였다. PHR 소자는 사진식각 및 건식에칭 공정을 통하여 마이크로 사이즈로 제작되었다. 직경이 $2.8\;{\mu}m$인 단일 자기비드가 있는 경우와 자기비드가 없는 경우 자기장의 세기에 다른 PHR 신호를 측정하였으며, 직경이 $2.8\;{\mu}m$인 단일 자기비드 측정에 성공하였다. 따라서 본 연구에서 제작한 PHR센서는 자기비드 입자의 유무에 따른 출력 특성의 차이를 이용하여 단일 자기비드 측정이 가능한 고분해능 자기 바이오센서에 응용될 수 있다.

Keywords

References

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