Fabrication of Monolithic Dual-scale Structure by Advanced Multi-step Capillary Force Lithography (CFL)

다중 모세관력 리소그래피를 이용한 단일 이중 구조의 제작

  • Suh, Kahp-Yang (Department of Mechanical and Aerospace Engineering, Seoul National Univ.) ;
  • Kwak, Rho-Kyun (Department of Mechanical and Aerospace Engineering, Seoul National Univ.) ;
  • Jeong, Hoon-Eui (Department of Mechanical and Aerospace Engineering, Seoul National Univ.)
  • 서갑양 (서울대학교 기계항공공학부) ;
  • 곽노균 (서울대학교 기계항공공학부) ;
  • 정훈의 (서울대학교 기계항공공학부)
  • Published : 2009.06.01

Abstract

Keywords

References

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