Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Electron Beam Lithography and Nano Imprint Lithography for High-Efficiency Optical Devices

고효율 광학 소자를 위한 전자빔 및 나노임프린트 기술

  • 조상욱 (부산대학교 나노과학기술대학) ;
  • 오승훈 (부산대학교 나노과학기술대학) ;
  • 김창석 (부산대학교 나노과학기술대학) ;
  • 정명영 (부산대학교 나노과학기술대학)
  • Published : 2009.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords

References

  1. Oh, S. H., Choi, D. S., Kim, C. S. and Jeong, M. Y., "PDMS Stamp Fabrication for P hotonic Crystal Waveguides," J. of KSPE, Vol. 24, No. 4, pp. 153-158,2007
  2. Pan, C. T., Lo, S. C., Yang, J. C. and Chen, Y. J., "Fabrication of optical disk mastering using electron beam and embossing process," Optical and QuantumElectronics, Vol. 39, No. 8, pp. 693-705, 2007 https://doi.org/10.1007/s11082-007-9121-5
  3. Bailey, T., Choi, B. J., Colburn, M., Meissl, M., Shaya, S., Ekerdt, J. G., Sreenivasan, S. V. and Willson, C. G., "Step and flash imprint lithography:Template surface treatment and defect analysis," J. of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, No. 6, pp. 3572-3577, 2000 https://doi.org/10.1116/1.1324618
  4. Guo, L. J., "Nanoimprint Lithography:Methods and Material Requirements," Advanced materials, Vol. 19, No. 4, pp. 495-513, 2006 https://doi.org/10.1002/adma.200600882
  5. Choi, C. G., Kee, C. S. and Helmut, S., "Fabrication of polymer photonic crystal slabs using nanoimprint lithography," Current Applied Physics, Vol. 6, pp. e8-e11, 2006 https://doi.org/10.1016/j.cap.2006.01.003
  6. Beach, J. V., Petersen, J. S., Eynon, B., Taylor, D., Gerold, D. J. and Maslow, M. J., "Imaging 100-nm contacts with high-transmission attenuated phaseshifts," Proc. SPIE., Vol. 4889, pp. 1242-1252, 2002 https://doi.org/10.1117/12.467763
  7. Colburn, M., Grot, A., Amistoso, M., Choi, B. J., Bailey, T., Ekerdt, J., Sreenivasan, S. V., Hollenhorst, J. and Willson, C. G., "Step and flash imprintlithography for sub-100nm patterning," Proc. of SPIE, Vol. 3997, pp. 453-457, 2000 https://doi.org/10.1117/12.390082
  8. Wierer, J. J., Krames, M. R., Epler, J. E., Gardner, N. F., Craford, M. G., Wendt, J. R., Simmons, J. A. and Sigalas, M. M., "InGaN/GaN quantum-wellheterostructure light-emitting diodes employing photonic crystal structures," Appl. Phys. Lett., Vol. 84, No. 19, pp. 3885-3887, 2004 https://doi.org/10.1063/1.1738934
  9. Hershey, R., Miller, M., Jones, C., Subramanian, M. G., Lu, X., Doyle, G., Lentz, D. and LaBrake, D., "2D photonic crystal patterning for high-volume LEDmanufacturing," Proc. of SPIE, Vol. 6337, p. 63370M, 2006 https://doi.org/10.1117/12.681481
  10. Cho, H. K., Jang, J., Choi, J.-H., Choi, J., Kim, J., Lee, J. S., Lee, B., Choe, Y. H., Lee, K.-D., Kim, S. H., Lee, K., Kim, S.-K. and Lee, Y.-H., "Light extraction enhancement from nanoimprinted photonic crystal GaN-based blue lightemitting diodes," Optics Express, Vol. 14, No. 19, pp. 8654-8660, 2006 https://doi.org/10.1364/OE.14.008654