한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제18권3호
  • /
  • Pages.307-314
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  • 2009
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

Development of Roll-to- Flat Thermal Imprinting Equipment and Experimental Study of Large Area Pattern Replication on Polymer Substrate

  • Lee, Moon-G. (Division of Mechanical Engineering, Ajou University) ;
  • Lan, Shuhuai (Division of Mechanical Engineering, Ajou University) ;
  • Lee, Soo-Hun (Division of Mechanical Engineering, Ajou University) ;
  • Lee, Hye-Jin (Korea Institute of Industrial Technology Micro-Nano Manufacturing Team) ;
  • Ni, Jun (S.M. Wu Manufacturing Research Center, University of Michigan) ;
  • Sung, Yeon-Wook (Division of Mechanical Engineering, Ajou University)
  • 발행 : 2009.06.15
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초록

Large area micro pattern replication has promising application potential in many areas. Rolling imprint process has been demonstrated as one of the most competitive processes for such micro pattern replication, because it has advantages in low cost, high throughput and high efficiency. In this paper, we developed a prototype of roll-to-flat(R2F) thermal imprint system for large area micro pattern replication process, which is one of the key processes in the fabrication of flexible displays. Experimental tests were conducted to evaluate the feasibility of system and the parameters' effect on the process, such as flat mold temperature, loading pressure and rolling speed. 100mm $\times$ 100mm stainless steel flat mold and commercially available polycarbonate sheets were used for the tests. The experimental results showed that the developed R2F system is suitable for fabrication of various micro devices with micro pattern over large area.

키워드

참고문헌

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