DOI QR코드

DOI QR Code

Application of Area-Saving RF Test Structure on Mobility Extraction

  • Lee, Jae-Hong (Inter-University Semiconductor Research Center (ISRC), and School of Electrical Engineering, Seoul National University) ;
  • Kim, Jun-Soo (Inter-University Semiconductor Research Center (ISRC), and School of Electrical Engineering, Seoul National University) ;
  • Park, Byung-Gook (Inter-University Semiconductor Research Center (ISRC), and School of Electrical Engineering, Seoul National University) ;
  • Lee, Jong-Duk (Inter-University Semiconductor Research Center (ISRC), and School of Electrical Engineering, Seoul National University) ;
  • Shin, Hyung-Cheol (Inter-University Semiconductor Research Center (ISRC), and School of Electrical Engineering, Seoul National University)
  • 발행 : 2009.06.30

초록

An RF test structure is proposed and its applicability is confirmed by measuring DC characteristics and high frequency characteristics. Effective mobility extraction is also performed to confirm the validity of proposed test structure. The area of suggested test structure consumed on wafer was decreased by more than 50% and its characteristics do not be degraded compared with conventional structure.

키워드

참고문헌

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  5. Junsoo Kim, Jaehong Lee, Yeonam Yun, Byung-Gook Park, Jong Duk Lee, and Hyungcheol Shin, "Accurate Extraction of Mobility, Effective Channel Length, and Source/Drain Resistance in 60 nm MOSFETs", International Conference on Solid State Devices and Materials, pp. 442-443, 2007
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