Development of Dithering Process for Accuracy of Microstructure by Projection Microstereolithgraphy based on UV-DMD

UV-DMD 기반의 전사방식 미세광조형에서 미세 구조물의 정밀도 개선을 위한 Dithering Process 개발

  • Published : 2009.08.01

Abstract

Keywords

References

  1. Varadan, V., Jiang X. and Varadan, V. V., "Microstereo-lithography and other fabrication techniques for 3D MEMS," John Wiley & Sons, pp.103-138, 2001
  2. Jacobs, P. F., "Rapid Prototyping and manufacturing: Fundamentals of Stereolithography," Society of Manufacturing Engineers, pp. 81-92, 1992
  3. Nakamoto, T., Yamaguchi, K. and Abraha A. P., "Consideration on the producing of high aspect ratio micro parts using uv sensitive photopolymer," Proceeding of 7th International Symposium on Micro Machine and Human Science, pp. 53-58, 1996
  4. Bertsh, A., Zissi, S., Jezequel, J. Y., Corbel, S. and Andre, J. C., "Microstereolithography using a liquid crystal display as dynamic mask generator," Microsystem Technologies, Vol. 3, No. 2, pp. 42-47, 1997 https://doi.org/10.1007/s005420050053
  5. Beluze, L., Bertsch, A. and Renaud. P., "Microstereolithography: a new process to build complex 3D objects," Proc. SPIE, Vol. 3680, No.2, pp. 808-817, 1999 https://doi.org/10.1117/12.341277
  6. Hayashi, T., Shibata, T., Kawashima, T., Makino, E., Mineta, T. and Masuzawa, T., "Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist," Sensors and actuators A Physical, Vol. 144, No. 2, pp. 381-388, 2008 https://doi.org/10.1016/j.sna.2008.02.014
  7. Park, I. B., Choi, J. W., Ha, Y. M. and Lee, S. H., "Multiple Fabrications of Sacrificial Layers to Enhance the Dimensional Accuracy of Microstructures in Maskless Projection Microstereolithography," International Journal of Precision Engineering and Manufacturing, Vol. 10, No. 1, pp. 91-98, 2009 https://doi.org/10.1007/s12541-009-0014-3
  8. Sun, C., Fang, N., Wu, D. M. and Zhang, X., "Projection micro-stereolithography using digital micro-mirror dynamic mask," Journal of Sensors and Actuators A: Physical, Vol. 121, No. 1, pp. 113-120, 2005 https://doi.org/10.1016/j.sna.2004.12.011
  9. Douglass, M. R., "Lifetime Estimates and Unique Failure Mechanism of the Digital Micromirror Device," IEEE International Proc. of Reliability Physics Symposium, pp. 9-16, 1998
  10. Dudley, D., Duncan, W. and Slaughter, J., "Emerging Digital Micromirror Device (DMD) Applications," Proc. SPIE, Vol. 4985, pp. 14-25, 2003 https://doi.org/10.1117/12.480761
  11. Ha, Y. M., Choi, J. W. and Lee, S. H., "Mass production of 3-d microstructures using projection microstereolithography," Journal of Mechanical Science and Technology, Vol. 22, No. 3, pp. 514-521, 2008 https://doi.org/10.1007/s12206-007-1031-8
  12. Johnson, S., "Stephen Johnson on Digital Photography," O'REILLY, pp. 17-19, 2006