Recent Trends in MEMS Microphone and Application for Hearing Aid System

초소형 마이크로폰 어레이 기반 청각보조시스템 기술동향

  • Hur, Shin (Nano Convergence and Manufacturing Systems Research Division, KIMM) ;
  • Choi, Hong-Soo (Nano Convergence and Manufacturing Systems Research Division, KIMM) ;
  • Park, Joon-Sik (Nano Convergence and Manufacturing Systems Research Division, KIMM) ;
  • Kim, Yang-Han (Department of Mechanical Engineering, KAIST)
  • 허신 (한국기계연구원 나노융합.생산시스템연구본부) ;
  • 최홍수 (한국기계연구원 나노융합.생산시스템연구본부) ;
  • 박준석 (한국기계연구원 나노융합.생산시스템연구본부) ;
  • 김양한 (한국과학기술원 기계공학과)
  • Published : 2009.11.01

Abstract

Keywords

References

  1. Neumann, J. J. and Gabriel, K. J., "CMOS-MEMS Membrane for Audio-frequency Acoustic Actuation," Sensors and Actuators A, Vol. 95, No. 2, pp. 175-182, 2002 https://doi.org/10.1016/S0924-4247(01)00728-2
  2. Liu, J., Martin, D., Kadirvel, K., Nishida, T., Sheplak, M., and Mann, B., "Nonlinear identification of a capacitive dual-backplate MEMS microphone," 2005 ASME IDETC, Paper No. DETC2005-84591, 2005
  3. Ganji, B. and Majlis, B., "Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm," Journal of Micro/Nanolithography, MEMS and MOEMS, Vol. 8, No. 2, Paper No. 021112, 2009 https://doi.org/10.1117/1.3091941
  4. Loeppert, P. and Lee, S., "SiSonic$^{TM}$ - the first commercialized MEMS microphone," Proc. Of Solid-State Sensors, Actuators, and Microsystems Workshop, pp. 27-30, 2006
  5. Arora, A., Arora, A., Dwivedi, V. K., George, P. J., Sreenivas, K. and Gupta, V., "Zinc oxide thin filmbased MEMS acoustic sensor with tunnel for pressure compensation," Sensors and Actuators A, Vol. 141, No. 2, pp. 256-261, 2007 https://doi.org/10.1016/j.sna.2007.09.016
  6. Han, C. and Kim, E., "Simulation of piezoelectric dome-shaped diaphragm acoustic transducers," Journal of Semiconductor Technology and Science, Vol. 5, No. 1, pp. 17-23, 2005
  7. Lee, W. and Lee, S., "Piezoelectric microphone built on circular diaphragm," Sensors and Actuators A, Vol. 144, No. 2, pp. 367-373, 2008 https://doi.org/10.1016/j.sna.2008.02.001
  8. Choi, B. and Lee, W., "A study on the energy harvesting system using piezoelectric direct effect of piezo film," J. Korean Society for Precision Engineering, Vol. 25, No. 9, pp. 78-85, 2008
  9. Hur, S., Yun, Y. and Lee, S., "Nano-bio sensor technology using micro cantilever," J. Korean Society for Precision Engineering, Vol. 25, No. 11, pp. 22-29, 2008
  10. Johnson, D. and Eudgeon, D., "Array signal processing: concepts and techniques," Englewood Cliffs, NJ: Prentice-Hall, 1993
  11. King, W. and Bechedrt, D., "On the sources of wayside noise generted by high-speed trains," Journal of Sound and Vibration, Vol. 66, No. 3, pp. 311-332, 1979 https://doi.org/10.1016/0022-460X(79)90848-4
  12. Graham, T., "Long-wavelength acoustic holography," J. Acoustical Society of America, Vol. 46, No. 1A, p. 116, 1969 https://doi.org/10.1121/1.1972702
  13. Choi, Y. and Kim, Y., "Near field impulsive source localization in a noisy enviroment," Journal of Sound and Vibration, Vol. 303, No. 1-2, pp. 209-220, 2007 https://doi.org/10.1016/j.jsv.2007.01.024
  14. Williams, E., Maynard, J. and Skudrzyk, E., "Sound source reconstructions using a microphone array," J. Acoustical Society of America, Vol. 68, No. 1, pp. 340-344, 1980 https://doi.org/10.1121/1.384602
  15. Weinreich, G. and Arnold, E., "Method for measuring acoustic radiation fields," J. Acoustical Society of America, Vol. 68, No. 2, pp. 404-411, 1980 https://doi.org/10.1121/1.384751
  16. Williams, E., Dardy, H. and Fink, R., "Nearfield acoustical holography using an underwater, automated scanner," J. Acoustical Society of America, Vol. 78, No. 2, pp. 789-798, 1985 https://doi.org/10.1121/1.392449
  17. Lee, M. and Bolton, J., "Reconstruction of source distributions from sound pressures measured over discontinuous regions: Multipatch holography and interpolation," J. Acoustical Society of America, Vol. 121, No. 4, pp. 2086-2096, 2007 https://doi.org/10.1121/1.2536675
  18. Lee, M. and Bolton, J., "A one-step patch near-field acoustical holography procedure," J. Acoustical Society of America, Vol. 122, No. 3, pp. 1662-1670, 2007 https://doi.org/10.1121/1.2756799
  19. Maynard, J., Williams, E. and Lee, Y., "Nearfield acoustic holography(NAH): I. Theory of generalized holography and the developmen of NAH," J. Acoustical Society of America, Vol. 78, No. 4, pp. 1395-1413, 1985 https://doi.org/10.1121/1.392911
  20. Veronesi, W. and Maynard, J., "Nearfield acoustic holography (NAH): II. Holographic reconstruction algorithms and computer implementation," J. Acoustical Society of America, Vol. 81, No. 5, pp. 1307-1322, 1987 https://doi.org/10.1121/1.394536
  21. Bai, M. "Application of BEM(boundary element method) - based acoustic holography to radiation analysis of sound sources with arbitrarily shaped geometries," J. Acoustical Society of America, Vol. 92, No. 1, pp. 533-549, 1992 https://doi.org/10.1121/1.404263
  22. Kwon, H. and Kim, Y., "Moving frame technique for planar acoustic holography," J. Acoustical Society of America, Vol. 103, No. 4, pp. 1734-1741, 1998 https://doi.org/10.1121/1.421375
  23. Stanford D-HEAR(Directional HEarintg Array), http://www.stanford.edu/dept/news/news/2001/june6/widrow-66.html
  24. MIT CSAIL: MIT Project Oxygen, http://oxygen.lcs.mit.edu/
  25. Je, S., Kim, J., Kozicki, M. and Chae, J., "A Directional Capacitive MEMS Microphone Using Nano-electrodeposits," IEEE International Conference on Micro Electro Mechanical Systems, pp. 96-99, 2009
  26. Je, S. and Chae, J., "An Electromagnetically Actuated Micromachined Loudspeaker for Hearing Aids Applications," IEEE Sensors, pp. 1024-1027, 2007 https://doi.org/10.1109/ICSENS.2007.4388579
  27. Hur, S., Lee, S. and Kim, W., "Feasibility study of cochlear-like acoustic sensor using PMN-PT single crystal cantilever array," NSTI Nanotech, Vol. 3, pp. 223-226, 2008
  28. Choi, H., Ding, J., Bandyopadhyay, A., Anderson, M. and Bose, S., "Characterization and modeling of a piezoelectric micromachined ultrasonic transducer with a very large length/width aspect ratio," J. Micromechanics and Microengineering, Vol. 18, No. 2, Paper No. 025037, 2008 https://doi.org/10.1088/0960-1317/18/2/025037
  29. Choi, H., Ding, J., Bandyopadhyay, A. and Bose, S., "Finite element analysis of piezoelectric thin film membrane structures," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 54, No. 10, pp. 2036-2044, 2007 https://doi.org/10.1109/TUFFC.2007.498
  30. Choi, H., Dalakoti, A., Bose, S. and Bandyopadhyay, A., "Influence of Top Electrode Design on pMUTs Performance," Sensors and Actuators A, Vol. 135, No. 2, pp. 613-619, 2007 https://doi.org/10.1016/j.sna.2006.08.022
  31. Park, C. and Kim, Y., "Effects of the speed of moving noise sources on the sound visualization by means of moving frame acoustic holography," J. Acoustical Society of America, Vol. 108, No. 2, pp. 2719-2728, 2000 https://doi.org/10.1121/1.1322568
  32. Korea Health Industry Development Institute, "2008 Report on medical device markets," Korea Health Industry Development Institute, 2008
  33. Yole Development, http://www.yole.fr