Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Orthogonality Calibration of a High Precision Stage using Self-calibration Method

자가보정법을 이용한 정밀 스테이지의 직각도 보정

  • Kim, Ki-Hyun (Mechatronics and Manufacturing Technology Center, Samsung Electronics) ;
  • Park, Sang-Hyun (Mechatronics and Manufacturing Technology Center, Samsung Electronics) ;
  • Kim, Dong-Min (Mechatronics and Manufacturing Technology Center, Samsung Electronics) ;
  • Jang, Sang-Don (Mechatronics and Manufacturing Technology Center, Samsung Electronics)
  • 김기현 (삼성전자 생산기술연구소) ;
  • 박상현 (삼성전자 생산기술연구소) ;
  • 김동민 (삼성전자 생산기술연구소) ;
  • 장상돈 (삼성전자 생산기술연구소)
  • Published : 2010.03.01
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Abstract

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.

Keywords

References

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