Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

Hydrogen sensor of SWNT-PdOx system using the vacuum filtering deposition method

진공여과증착법을 이용한 SWNT-PdOx계 수소센서

  • Received : 2010.01.08
  • Accepted : 2010.02.17
  • Published : 2010.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

Hydrogen gas sensors were fabricated using $PdO_x$ loaded with SWNTs. The nanoparticle powders of $SWNT_s-PdO_x$ composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against hydrogen gas. The composition ratio that exhibited the highest response to hydrogen gases was SWNTs : $PdO_x$ = 98 : 2 in wt% ratio at operating temperature of about $150^{\circ}C$. The response and recovery times were shorter than 1.0 min. in presence of 1000 ppm hydrogen.

Keywords

References

  1. A.Katsuki and K.Fukui, "$H_2$ Selective gas sensor based on $SnO_2$", Sens. Actuators B, vol. 78, pp. 83-88, 2001. https://doi.org/10.1016/S0925-4005(01)00793-6
  2. T. Sasahara, A. Kido, H. Ishihara, T. Sunayama, and M. Egashira, "Highly sensitive detection of volatile organic compounds by an adsorption/combustion-type sensor based on mesoporous silica", Sens. Actuators B, vol. 108, pp. 478-483, 2005. https://doi.org/10.1016/j.snb.2004.12.118
  3. Chi-Hwan Han, Sang-Do Han, Ishwar Singh, and Thierry Toupance, "Micro-bead of nano-crystalline F-doped $SnO_2$ as a sensitive hydrogen gas sensor", Sens. Actuators B, vol. 109, pp. 264-269, 2005. https://doi.org/10.1016/j.snb.2004.12.115
  4. 홍대웅, 한치환, 김일진, 천성식, 한상도, 이상렬, "$Pd/ TiO_2$, $Pt/TiO_2$ 촉매를 이용한 접촉연소식 수소센서", 한국센서학회 종합학술대회 논문집, pp. 260-263, 2006.
  5. 김찬우, 곽지혜, 전일수, 한상도, 최시영, "평판형 접촉연소식 마이크로 수소센서의 감지특성 향상", J. Kor. Sensors Soc., vol. 18, no. 3, pp. 202-206, 2009. https://doi.org/10.5369/JSST.2009.18.3.202
  6. 홍대웅, 한치환, 한상도, 곽지혜, 이상렬, "광촉매와 UV LED를 이용한 접촉연소식 수소센서", J. Kor. Sensors Soc., vol. 16, no. 1, pp. 7-10, 2007. https://doi.org/10.5369/JSST.2007.16.1.007
  7. 정귀상, 안정학, "Pd/다결정 3C-SiC 쇼트키 다이오드형 수소센서의 제작과 그 특성", J. Kor. Sensors Soc., vol. 18, no. 3, pp. 222-225, 2009. https://doi.org/10.5369/JSST.2009.18.3.222
  8. 김광호, 최광표, 권용, 박진성, "수소 센서용 Pd 첨가한 박막의 특성", J. Kor. Sensors Soc., vol. 15, no. 2, pp. 120-126, 2006. https://doi.org/10.5369/JSST.2006.15.2.120
  9. 강기호, 조용수, 한상도, 최시영, "Pd-black 촉매금속 이용한 고성능 MISFET 형 수소센서", J. Kor. Sensors Soc., vol. 15, no. 2, pp. 90-96, 2006. https://doi.org/10.5369/JSST.2006.15.2.090
  10. 조우성, 문승일, 김영조, 박정호, 주병권, "다이아프램 구조를 이용한 탄소나노튜브 가스 센서의 가스 감응 특성", J. Kor. Sensors Soc., vol. 15, no. 1, pp. 13-19, 2006. https://doi.org/10.5369/JSST.2006.15.1.013
  11. 김민주, 윤광현, 허증수, "단층 탄소나노튜브의 일산화질소 가스에 대한 감응특성과 열처리 효과", J. Kor. Sensors Soc., vol. 13, no. 4, pp. 292-297, 2004. https://doi.org/10.5369/JSST.2004.13.4.292
  12. 조우성, 문승일, 백경갑, 박정호, "주병권패턴이 형성된 탄소나노튜브 매트의 이산화질소 감응 특성", J. Kor. Sensors Soc., vol. 15, no. 3, pp. 199-204, 2006. https://doi.org/10.5369/JSST.2006.15.3.199
  13. Junya Suehiro1, Guangbin Zhou, and Masanori Hara, "Fabrication of a carbon nanotube-based gas sensor using dielectrophoresis and its application for ammonia detection by impedance spectroscopy", J. Phys. D: Appl. Phys. vol. 36, pp. 109-114, 2003. https://doi.org/10.1088/0022-3727/36/21/L01
  14. W-S Cho, S-I Moon, Y-D Lee, Y-H Lee, J-H Park, and B K J, "Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure", Electron Device Letters, vol. 26, pp. 498-500, 2005. https://doi.org/10.1109/LED.2005.851095
  15. S. Iijima, "Helical microtubules of graphitic carbon", Nature, vol. 354, pp. 56-58, 1991. https://doi.org/10.1038/354056a0
  16. Ray H. Baughman, Anvar A. Zakhidov, and Walt A. de Heer, "Carbon nanotubes-the route toward applications", Science, vol. 297, pp. 787-792, 2002. https://doi.org/10.1126/science.1060928
  17. 김일진, 전영집, 최창규, 이영욱, 최시영, 한창수, 한상도, "진공여과증착법을 이용한 SWNT-PtOx계 마이크로 톨루엔 가스센서", J. Kor. Sensors Soc., vol. 18, No. 2 pp. 179-183, 2009. https://doi.org/10.5369/JSST.2009.18.2.179
  18. Y. Makita, S. Suzuki, H. Kataura, and Y. Achiba, "Synthesis of single wall carbon nanotubes by using arc discharge technique in nitrogen atmosphere", Eur. Phys. J. D, vol. 34, pp. 287-289, 2005. https://doi.org/10.1140/epjd/e2005-00160-3
  19. H-H Kim and H-J Kim, "Synthesis of single wall carbon nanotubes by using arc discharge technique in nitrogen atmosphere", Japanese J. Applied Physics, vol. 46, pp. 1818-1820, 2007. https://doi.org/10.1143/JJAP.46.1818
  20. A. Fujiwara, K. Ishii, and H. Suematsu, "Gas adsorption in the inside and outside of single-walled carbon nanotubes", Chemical Physics Letters, vol. 336, no. 3-4, pp. 205-211, 2001. https://doi.org/10.1016/S0009-2614(01)00111-7
  21. C. Cantalini, W. Wlodarski, and Y. Li, "Investigation on the $O_3$ sensitivity properties of $WO_3$ thin films prepared by sol-gel, thermal evaporation and r.f. sputtering techniques", Sensors and Actuators B, vol. 64, no. 1-3, pp. 182-188, 2000. https://doi.org/10.1016/S0925-4005(99)00504-3