Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Mirror-surface Machining Properties of Structural Ceramics using Diamond Abrasives

다이아몬드 지립을 이용한 구조세라믹스의 경면가공 특성

  • Kim, Yoo-Young (Department of Mechanical Engineering, JINJU National University) ;
  • Kwak, Tae-Soo (Department of Mechanical Engineering, JINJU National University) ;
  • Kim, Kyung-Nyun (Department of Mechanical Engineering, KOJE College)
  • 김유영 (국립진주산업대학교 기계공학과) ;
  • 곽태수 (국립진주산업대학교 기계공학과) ;
  • 김경년 (거제대학 기계공학과)
  • Received : 2010.05.04
  • Accepted : 2010.06.13
  • Published : 2010.07.31
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Abstract

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

Keywords

References

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