Polymer Science and Technology (한국고분자학회지:고분자과학과기술)
- Volume 21 Issue 3
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- Pages.228-235
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- 2010
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- 1225-0260(pISSN)
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- 2586-1476(eISSN)
Nanopatterning Using Self-Assembly of Block Copolymers for Microelectronic Application
블록 공중합체 자기조립을 이용한 반도체 나노패터닝
Abstract
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