Journal of the Korean Society for Nondestructive Testing (비파괴검사학회지)

The Korean Society for Nondestructive Testing (한국비파괴검사학회)
권호 표지
DOI QR코드

DOI QR Code

Evaluation of Adhesive Strength for Nano-Structured Thin Film by Scanning Acoustic Microscope

초음파 현미경을 이용한 나노 박막의 접합 강도 평가

  • Park, Tae-Sung (Mechanical Engineering, Seoul National University of Science and Technology) ;
  • Kwak, Dong-Ryul (Mechanical Engineering, Seoul National University of Science and Technology) ;
  • Park, Ik-Keun (Mechanical Engineering, Seoul National University of Science and Technology) ;
  • Miyasaka, Chiaki
  • 박태성 (서울과학기술대학교 기계공학과) ;
  • 곽동열 (서울과학기술대학교 기계공학과) ;
  • 박익근 (서울과학기술대학교 기계공학과) ;
  • Received : 2012.03.08
  • Accepted : 2012.08.03
  • Published : 2012.08.30
Download PDF
⟨ Previous Next ⟩

Abstract

In recent years, nano-structured thin film systems are often applied in industries such as MEMS/NEMS device, optical coating, semiconductor or like this. Thin films are used for many and varied purpose to provide resistance to abrasion, erosion, corrosion, or high temperature oxidation and also to provide special magnetic or dielectric properties. Quite a number of articles to evaluate the characterization of thin film structure such as film density, film grain size, film elastic properties, and film/substrate interface condition were reported. Among them, the evaluation of film adhesive to substrate has been of great interest. In this study, we fabricated the polymeric thin film system with different adhesive conditions to evaluate the adhesive condition of the thin film. The nano-structured thin film system was fabricated by spin coating method. And then V(z) curve technique was applied to evaluate adhesive condition of the interface by measuring the surface acoustic wave(SAW) velocity by scanning acoustic microscope(SAM). Furthermore, a nano-scratch technique was applied to the systems to obtain correlations between the velocity of the SAW propagating within the system including the interface and the shear adhesive force. The results show a good correlation between the SAW velocities measured by acoustic spectroscope and the critical load measured by the nano-scratch test. Consequently, V(z) curve method showed potentials for characterizing the adhesive conditions at the interface by acoustic microscope.

최근 나노 박막은 MEMS/NEMS, 광학 코팅, 반도체 산업 등 다양한 분야에서 사용이 되고 있다. 박막은 마모, 침식, 부식, 고온 산화를 방지하기 위한 목적으로 사용될 뿐 아니라 특성화된 자기, 유전적 특성을 만들기 위한 목적으로 사용된다. 많은 연구자들이 이러한 박막 구조의 특성(밀도, 입자 크기, 탄성 특성, 필름/기지 계면의 특성)을 평가하기 위하여 많은 연구를 진행하고 있다. 이들 중에 박막과 기지 사이의 접합 특성을 평가하는 것이 많은 연구자들의 주 관심사가 되어 왔다. 본 연구에서는 나노 박막의 접합 특성을 평가하기 위하여 각기 다른 접합 특성을 가지는 폴리머 박막 시험편을 제작하였다. 제작된 시험편의 접합 특성을 측정하기 위하여 초음파현미경의 V(z) 곡선법을 이용하여 표면파의 속도를 측정하였다. 또한 계면을 포함하는 시험편의 표면을 전파하는 표면파의 속도와 접합력의 상관관계를 확인하기 위해 나노 스크래치 시험을 적용하였다. 그 결과 초음파현미경을 이용하여 측정된 표면파의 속도와 나노스크래치 시험을 이용한 임계하중이 일치하는 경향성을 나타내었다. 결론적으로 초음파현미경의 V(z) 곡선법은 나노 스케일 박막 계면에서의 접합 상태를 평가할 수 있는 기법으로 그 가능성을 나타내었다.

Keywords

References

  1. D. S. Campbell, "Mechanical Properties of Thin Films," Handbook of Thin Film Technology, McGraw-Hill, Chap. 12 (1970)
  2. J. Strong, "On the cleaning of surfaces," Rev Sci Instr., Vol. 6, pp. 97-98 (1935) https://doi.org/10.1063/1.1751951
  3. Markus P. K. Turunen, Pekka Marjamaki, Matti Paajanen, Jouko Lahtinen and Jorma K Kivilahti, "Pull-off test in the assessment of adhesion at printed wiring board metallization/ epoxy interface," Microelectronics Reliability, Vol. 44, pp. 993-1007 (2004) https://doi.org/10.1016/j.microrel.2004.01.001
  4. O. S. Heavens, "Some factors influencing the adhesion of films produced by vacuum evaporation", Journal of Phys. Radium, Vol. 11, pp. 355 (1950) https://doi.org/10.1051/jphysrad:01950001107035500
  5. B. Roge, A. Fahr, J. S. R. Giguere and K. I. Mcare, "Nondestructive measurement of porosity in thermal barrier coating," Journal of Thermal Spray Technology, Vol. 12, No. 4, pp. 530-535 (2003) https://doi.org/10.1361/105996303772082279
  6. E. R. Doering, G. J. Havrilla and T. C. Miller, "Disilicide diffusion coating inspection by micro X-ray fluorescence imaging," Journal of Nondestructive Evaluation, Vol. 23, No. 3, pp. 95-105 (2004) https://doi.org/10.1023/B:JONE.0000048865.96417.bc
  7. J. Du, "Toward the Acoustic Evaluation of Low Modulus Thin Film Structures," Ph. D Thesis, The Pennsylvania State University, (2008)
  8. D. P. Almond, R. L. Cox, M. Moghi and H. Reiter, "Acoustic properties of plasma sprayed coatings and their application to nondestructive evaluation," Thin Solid Film, Vol. 83, pp. 311-324 (1989)
  9. C. Miyasaka, "Acoustic microscopy applied to nanostructured thin film systems," Modern Aspects of Electrochemistry, 44, pp. 409-450 (2009) https://doi.org/10.1007/978-0-387-49586-6_9
  10. R. C. Bray, C. F. Quite, J. Calhoun, and R. Koch, "Film adhesion studies with the acoustic microscope," Thin Solid Films, Vol. 74, No. 2 pp. 295-302, (1980)
  11. W. Parmon and H. L. Bertoni, "Ray interpretation of the material signature in the acoustic microscope," Electronics Letters, Vol. 15, No. 21, pp. 684-686 (1979) https://doi.org/10.1049/el:19790486
  12. H. L. Bertoni, "Ray-optical evaluation of V(z) in the reflection acoustic microscope," IEEE Transactions on Sonics and Ultrasonics, SU-31(2), pp. 105-116 (1984)
  13. D. Jikai, B. R. Tittmann and H. S. Ju, "Evaluation of film adhesion to substrates by means of surface acoustic wave dispersion," Thin Solid Films, Vol. 518, pp. 5786-5795, (2010) https://doi.org/10.1016/j.tsf.2010.05.086
  14. M. T. Laugier, "An energy approach to the adhesion of coatings using the scratch test," Thin Solid Films, Vol. 117, No. 4, pp. 243-249 (1984) https://doi.org/10.1016/0040-6090(84)90354-7
  15. M. T. Laugier, "Adhesion of TiC and TiN coatings prepared by chemical vapour deposition on WC-Co-based cemented carbides," J. Mat. Sci., Vol. 21, No. 7, pp. 2269-2272 (1986) https://doi.org/10.1007/BF01114266
  16. S. J. Bull, D. S. Rickerby, A. Matthews, A. Leyland, A. R. Pace and J. Valli, "The use of scratch adhesion testing for the determination of interfacial adhesion: The importance of frictional drag," Surface and Coating. Technology, Vol. 36, Issure 2 pp. 503-517 (1988) https://doi.org/10.1016/0257-8972(88)90178-8
  17. S. J. Bull and P. J. Rickerby, "New developments in the modelling of the hardness and scratch adhesion of thin films," Surface and Coating. Technology, Vol. 42, Issure 2, pp. 149-164 (1990) https://doi.org/10.1016/0257-8972(90)90121-R
  18. P. J. Bunett and D. S. Rickerby, "The scratch adhesion test: an elastic-plastic indentation analysis," Thin Solid Films, Vol. 157, Issue 2, pp. 233-244 (1988) https://doi.org/10.1016/0040-6090(88)90006-5
  19. S. J. Bull and D. S. Rickerby, "New developments in the modelling of the hardness and scratch adhesion of thin films," Surface and Coating Technology, Vol. 42, Issue 2, pp. 149-164 (1930)
  20. N. U. Choi, S. B. Park, S. S, Moon and J. H. Kim, "Surface and interface properties of polymers in semiconductor application," Polymer Science and Technology, Vol. 17, No. 2, pp. 182-190 (2006)