Membrane Journal (멤브레인)

The Membrane Society of Korea (한국막학회)
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Separation and Recovery of F-gases

불화 온실 가스 저감 및 분리회수 기술의 연구개발 동향

  • Nam, Seung-Eun (Resources Separation and Recovery Research Group, Korea Research Institute of Chemical Technology) ;
  • Park, Ahrumi (Resources Separation and Recovery Research Group, Korea Research Institute of Chemical Technology) ;
  • Park, You-In (Resources Separation and Recovery Research Group, Korea Research Institute of Chemical Technology)
  • 남승은 (한국화학연구원 자원분리회수연구그룹) ;
  • 박아름이 (한국화학연구원 자원분리회수연구그룹) ;
  • 박유인 (한국화학연구원 자원분리회수연구그룹)
  • Received : 2013.04.09
  • Accepted : 2013.06.27
  • Published : 2013.06.30
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Abstract

F-gases, gases containing fluorine such as perfluorocarbons (PFCs), sulfurhexafluoride ($SF_6$), nitrogen trifluoride ($NF_3$) are known to have green house effects. Although the net emission rates of gases containing fluorine are much lower than those of $CO_2$, their contribution to global warming cannot be ignored because of their extremely high global warming potential (GWP). F-gases mainly have been used for a variaty of applications in the semiconductor/LCD processes and in the electric power distribution industry of the national key industry. One of practical solutions of controlling the emission rates of F-gases is to reuse by separation and recovery of F-gases of low concentration from the gases mixtures with nitrogen or air. This work investigates some methods for F-gases recovery and separation around the membrane-based process.

과불화질소, 육불화황, 삼불화질소와 같은 불소를 포함한 불화가스는 이산화탄소 온실가스에 비교해 배출량은 적지만 지구온난화지수가 매우 높아 지구온난화에 미치는 영향이 크다. 이러한 불화가스의 주요배출원이 국가 중추산업인 반도체/LCD 산업이나 중전기 산업 등에 집중되어 있어 더욱 심각하다. 따라서 본 논문에서는 불화가스 저감 기술 중 분리막 기반 불화가스 회수 분리 공정을 중심으로 불화가스 저감 기술 개발 현황을 살펴보고자 하였다.

Keywords

References

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