Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

Effects of Interlayer Formation and Thermal Treatment on Field-emission Properties of Carbon Nanotube Micro-tips

계면층 형성 및 열처리가 탄소 나노튜브 미세팁의 전계방출 특성에 미치는 영향

  • Kim, Bu-Jong (Department of Electronic Systems Engineering, Hanyang University) ;
  • Park, Jin-Seok (Department of Electronic Systems Engineering, Hanyang University)
  • 김부종 (한양대학교 전자시스템공학과) ;
  • 박진석 (한양대학교 전자시스템공학과)
  • Received : 2013.02.25
  • Accepted : 2013.05.31
  • Published : 2013.06.30
Download PDF
⟨ Previous Next ⟩

Abstract

The effects of interlayer formation and thermal treatment on the field-emission properties of carbon nanotubes (CNTs) were investigated. The CNTs were prepared on tungsten (W) micro-tip substrates using the electrophoretic deposition (EPD) method. The interlayers, such as aluminum (Al) and hafnium (Hf) were coated on the W-tips prior to CNT deposition and after the deposition of CNTs all the species were thermally treated at $700^{\circ}C$ for 30 min. The field-emission properties of CNTs were significantly improved by thermal treatment. The threshold electric field for igniting the electron emission was decreased and the emission current was increased. The Raman spectroscopy results indicated that this was attributed mainly to the enhancement of CNTs by thermal treatment. Also, the CNTs deposited on the interlayers showed the remarkably improved results in the long-term emission stability, especially when they were thermally treated. The X-ray photoelectron spectroscopy (XPS) measurement confirmed that this was resulted from the formation of the additional cohesive forces between the CNTs and the underlying interlayers.

Keywords

References

  1. Maeda, Y., Komoriya, K., Sode, K., Higo, J., Nakamura, T., Yamada, M., Hasegawa, T., Akasaka, T., Saito, T., Lu, J., and Nagase, S., "Preparation and characterization of transparent and conductive thin films of single-walled carbon nanotubes", Nanoscale, Vol. 3, pp. 1904-1909, 2011 https://doi.org/10.1039/c0nr00940g
  2. Sugie, H., Tanemura, M., Filip, V., Iwata, K., Takahashi, K., and Okuyama, F., "Carbon nanotubes as electron source in an x-ray tube", Applied physics letters, Vol. 78, pp. 2578-2580, 2001. https://doi.org/10.1063/1.1367278
  3. Jung, H. Y., Jung, S. M., and Suh, J. S., "Horizontally aligned single-walled carbon nanotube field emitters fabricated on vertically aligned multi-walled carbon nanotube electrode arrays", CARBON, Vol. 46, pp.1345-1349, 2008. https://doi.org/10.1016/j.carbon.2008.05.020
  4. Kim., J. P., Chang, H. B., Kim, B. J., and Park, J. S., "Enhancement of electron emission and long-term stability of tip-type carbon nanotube field emitters via lithium coating",Thin Solid Films, Vol. 528, pp.242- 246, 2013 https://doi.org/10.1016/j.tsf.2012.08.060
  5. Noh, Y. R., Kim, J. P., Chang, H. B., and Park, J. S., "Coating of carbon nanotubes with amorphous carbon nitride thin films and characterization of long-term emission stability", Thin Solid Films, Vol. 519, pp. 1636-1641, 2010. https://doi.org/10.1016/j.tsf.2010.08.163
  6. Boccaccini, Aldo. R., Cho, Johann., Roether, Judith. A., Thomas, Boris. J. C., Minay, E. Jane., and Shaffer, Milo. S. P., "Electrophoretic deposition of carbon nanotubes", CARBON, Vol. 44, pp.3149-3160, 2006 https://doi.org/10.1016/j.carbon.2006.06.021
  7. Sveningsson, M., Morjan, R. -E., Nerushev, O. A., Sato, Y., Backstrom, J., Campbell, E. E. B., and Rohmund., F., "Raman spectroscopy and fieldemission properties of CVD-grown carbon-nanotube films", Applied Physics A Materials, Vol, 73, pp.409-418, 2001 https://doi.org/10.1007/s003390100923
  8. Okpalugo, T. I. T., Papakonstantinou, P., Murphy, H., McLaughlin, J., and Brown, N. M. D., "High resolution XPS characterization of chemical functionalized MWCNTs and SWCNTs", CARBON, Vol. 43, pp.153-161, 2005 https://doi.org/10.1016/j.carbon.2004.08.033
  9. Yang, P. C., Chang, T. C., Chen, S. C., Su, H. H., Huang, H. C., Gan, D. S., and Ho, N. J., "Improvement on low-temperature deposited HfO2 film and interfacial layer by high-pressure oxygen treatment", Solid-State Electronics, Vol. 62, pp.18-131, 2011
  10. Hinnen, C., Imbert, D., Siffre, J. M., and Marcus, P., "An in situ XPS study of sputter-deposited aluminium thin films on graphite", Applied Surface Science, Vol. 78, pp.219-231, 1994 https://doi.org/10.1016/0169-4332(94)90009-4