한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제23권6호
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  • Pages.533-538
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  • 2014
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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Fabrication of Superoleophobic Surface with Anisotropic Wettability Using Silicon Wafer

  • Lee, Dong-Ki (Graduate School of NID Fusion Technology, Seoul National University of Science & Technology) ;
  • Lee, Eun-Haeng (Department of Mechanical System Design Engineering, Seoul National University of Science & Technology) ;
  • Cho, Younghak (Department of Mechanical System Design Engineering, Seoul National University of Science & Technology)
  • 투고 : 2014.07.25
  • 심사 : 2014.10.21
  • 발행 : 2014.12.15
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초록

We fabricated grooved mushroom structures with anisotropic wettability on silicon substrates using basic MEMS processes. The geometry of these grooved mushroom structures could be changed by controlling the additional IPA solution during Si etching by TMAH solution. To understand anisotropic wettability, contact angles (CAs) of hexadecane droplets were measured in the orthogonal and parallel directions to grooved lines. The CA measurement results displayed anisotropic wetting on the grooved mushroom structures. However, specimens with $80{\mu}m$ distance between top layers displayed isotropic and superoleophobic wetting. This study demonstrates that the thickness of the top layer is more critical than the width or height of the ridge when determining the wettability of organic solvent. Despite the wide distance between top layers ($80{\mu}m$), the specimen with a thin top layer (100 nm) showed highly anisotropic wetting and low CA due to the pinning of droplets at the edge of the top layer.

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참고문헌

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피인용 문헌

  1. A superoleophobic surface with anisotropic flow of hexadecane droplets vol.23, pp.2, 2014, https://doi.org/10.1007/s00542-016-2945-9
  2. Fabrication of Anisotropically Oleophobic Surface with Inverse-Tapered Structure Using Micromolding in Capillaries and Microtransfer Molding vol.36, pp.4, 2014, https://doi.org/10.7736/kspe.2019.36.4.413