한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제23권6호
  • /
  • Pages.539-546
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  • 2014
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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An Ultra-precision Electronic Clinometer for Measurement of Small Inclination Angles

  • Tan, Siew-Leng (Department of Nanomechanics, School of Engineering, Tohoku University) ;
  • Kataoka, Satoshi (Department of Nanomechanics, School of Engineering, Tohoku University) ;
  • Ishikawa, Tatsuya (Department of Nanomechanics, School of Engineering, Tohoku University) ;
  • Ito, So (Department of Nanomechanics, School of Engineering, Tohoku University) ;
  • Shimizu, Yuuki (Department of Nanomechanics, School of Engineering, Tohoku University) ;
  • Chen, Yuanliu (Department of Nanomechanics, School of Engineering, Tohoku University) ;
  • Gao, Wei (Department of Nanomechanics, School of Engineering, Tohoku University) ;
  • Nakagawa, Satoshi (Micro Computer Science)
  • 투고 : 2014.12.11
  • 심사 : 2014.11.12
  • 발행 : 2014.12.15
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초록

This paper describes an ultra-precision electronic clinometer, which is based on the capacitive-based fluid type, for detection of small inclination angles. The main parts of the clinometer low-noise electronics are two capacitance measurement circuits for converting the capacitances of the capacitors of the clinometer into voltages, and a differential amplifier for obtaining the difference of the capacitances, which is proportional to the input inclination angle. A 16 bit analog to digital (AD) converter is also embedded into the same circuit board, whose output is sent to a PC via RS-232C, for achieving a small noise level down to tens of ${\mu}v$. A compensation method, which is referred to as the delay time method for shortening the stabilization time of the sensor was also discussed. Experimental results have shown the possibility of achieving a measurement resolution of $0.0001^{\circ}$ as well as the quick measurement with the delay time method.

키워드

참고문헌

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피인용 문헌

  1. High Resolution Clinometers for Measurement of Roll Error Motion of a Precision Linear Slide vol.31, pp.1, 2018, https://doi.org/10.1186/s10033-018-0294-6