Journal of the Korean Institute of Illuminating and Electrical Installation Engineers (조명전기설비학회논문지)

The Korean Institute of IIIuminating and Electrical Installation Engineers (한국조명전기설비학회)
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Surface characteristics of Molybdenum Oxide Films Prepared by Oxidation Thermal Treatment Method

산화 열처리법에 의해 제작된 산화 몰리브데늄 박막의 표면특성 고찰

  • Received : 2014.01.15
  • Accepted : 2014.02.03
  • Published : 2014.03.31
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Abstract

In this work, molybdenum oxide films were fabricated by heat-treatment method. Fundamental surface characteristics of molybdenum oxide films were investigated using XRD and Raman spectroscopy. From the results, the optimum MoOx films could be obtained under the conditions of thermal treatment temperature of $550^{\circ}C$, oxidation time of 30 minutes and oxygen flow rate of 250sccm. The thermal treatment method offers a simple and effective route for the synthesis of uniform $MoO_3$ films.

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References

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