Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Alignment Algorithm for Nano-scale Three-dimensional Printing System

나노스케일 3 차원 프린팅 시스템을 위한 정렬 알고리즘

  • Jang, Ki-Hwan (Department of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Lee, Hyun-Taek (Department of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Kim, Chung-Soo (Department of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Chu, Won-Shik (Institute of Advanced Machines and Design, Seoul National University) ;
  • Ahn, Sung-Hoon (Department of Mechanical and Aerospace Engineering, Seoul National University)
  • 장기환 (서울대학교 기계항공공학부) ;
  • 이현택 (서울대학교 기계항공공학부) ;
  • 김충수 (서울대학교 기계항공공학부) ;
  • 추원식 (서울대학교 정밀기계설계공동연구소) ;
  • 안성훈 (서울대학교 기계항공공학부)
  • Received : 2014.09.23
  • Accepted : 2014.11.14
  • Published : 2014.12.01
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Abstract

Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

Keywords

References

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