Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Theoretical Study for the ITO/Si based High Contrast Grating Structure with Focusing Capability and its Fabrication

  • Kim, J.Y. (Department of Physics and Chemistry, Korea Military Academy) ;
  • Yeon, K.H. (Center for Opto-Electronic Convergence Systems, Korea Institute of Science and Technology) ;
  • Kyhm, J. (Center for Opto-Electronic Convergence Systems, Korea Institute of Science and Technology) ;
  • Cho, W.J. (Center for Opto-Electronic Convergence Systems, Korea Institute of Science and Technology) ;
  • Kim, T.J. (Nano-Optical Property Laboratory and Department of Physics, Kyung Hee University) ;
  • Kim, Y.D. (Nano-Optical Property Laboratory and Department of Physics, Kyung Hee University) ;
  • Song, J.D. (Center for Opto-Electronic Convergence Systems, Korea Institute of Science and Technology)
  • Received : 2015.10.14
  • Accepted : 2015.10.26
  • Published : 2015.11.30
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Abstract

High contrast grating (HCG) is the structure made up of the sub-wavelength grating of high-index and the surrounding layer of low-index, which reveals high contrast between two materials. Its advantages include high reflectivity over a broad bandwidth, polarization and wavelength selectivity, optical high-Q resonator, and phase modulation. In this work, the HCG structure comprising of indium tin oxide (ITO) and Silicon (Si), for the surrounding layer and the grating layer respectively, was studied. Its theoretical model was established, and transmittance, phase and optical behavior were calculated by rigorous coupled-wave analysis and finite element method. Furthermore, the established structure was fabricated to validate its feasibility. The fabricated structure shows the focusing capability whose length is about $10{\mu}m$, and the feasibility of the structure was demonstrated. It is also meaningful that ITO layer can contribute to the fabrication of the HCG structure, leading to enable the structure to be electrical-driven.

Keywords

References

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