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Transverse Wave Propagation in [ab0] Direction of Silicon Single Crystal

  • Yun, Sangjin (Applied Acoustics Lab, Korea Science Academy of KAIST) ;
  • Kim, Hye-Jeong (Applied Acoustics Lab, Korea Science Academy of KAIST) ;
  • Kwon, Seho (Applied Acoustics Lab, Korea Science Academy of KAIST) ;
  • Kim, Young H. (Applied Acoustics Lab, Korea Science Academy of KAIST)
  • 투고 : 2015.06.02
  • 심사 : 2015.10.12
  • 발행 : 2015.12.30

초록

The speed and oscillation directions of elastic waves propagating in the [ab0] direction of a silicon single crystal were obtained by solving Christoffel's equation. It was found that the quasi waves propagate in the off-principal axis, and hence, the directions of the phase and group velocities are not the same. The maximum deviation of the two directions was $7.2^{\circ}$. Two modes of the pure transverse waves propagate in the [110] direction with different speeds, and hence, two peaks were observed in the pulse echo signal. The amplitude ratio of the two peaks was dependent on the initial oscillating direction of the incident wave. The pure and quasi-transverse waves propagate in the [210] direction, and the oscillation directions of these waves are perpendicular to each other. The skewing angle of the quasi wave was calculated as $7.14^{\circ}$, and it was measured as $9.76^{\circ}$. The amplitude decomposition in the [210] direction was similar to that in the [110] direction, since the oscillation directions of these waves are perpendicular to each other. These results offer useful information in measuring the crystal orientation of the silicon single crystal.

키워드

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피인용 문헌

  1. Measurement of ultrasonic surface wave velocities in silicon crystals and its comparison with finite element analysis vol.56, pp.7S1, 2017, https://doi.org/10.7567/JJAP.56.07JB04