마이크로전자및패키징학회지 (Journal of the Microelectronics and Packaging Society)

  • 제22권1호
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  • Pages.63-67
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  • 2015
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  • 1226-9360(pISSN)
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  • 2287-7525(eISSN)
한국마이크로전자및패키징학회 (The Korean Microelectronics and Packaging Society)
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나노 금속 격자형 편광필름 제작에서 증착 두께에 따른 광 특성 연구

A Study on Optical Characteristic of Nano Metal Grid Polarizer Film with Different Deposition Thicknes

  • 김지원 (부산대학교 인지메카트로닉스공학과) ;
  • 조상욱 (부산대학교 인지메카트로닉스공학과) ;
  • 정명영 (부산대학교 인지메카트로닉스공학과)
  • Kim, Jiwon (Department of Cogno-Mechatronics Engineering, Pusan National University) ;
  • Cho, Sanguk (Department of Cogno-Mechatronics Engineering, Pusan National University) ;
  • Jeong, Myung Yung (Department of Cogno-Mechatronics Engineering, Pusan National University)
  • 투고 : 2015.03.18
  • 심사 : 2015.03.27
  • 발행 : 2015.03.30
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초록

본 연구에서는 대면적 나노 금속 격자형 편광 필름 제작에서 증착 두께에 따른 광 특성 연구를 수행하였다. 나노 금속 격자형 편광필름은 PET(Polyethylene phthalate)기판 위에 알루미늄 선 격자 구조로 구성된다. 본 연구에서는 대면적 편광필름 제작을 위한 증착공정을 통한 금속 격자 형성을 목표로 하였으며, 금속 격자형 편광 필름 제작에 있어 최적의 투과율과 소광비를 가지는 금속 박막 형성 조건을 도출하였다. 최적화 공정에 의해 나노 금속 격자형 편광필름은 140 nm 주기, 70 nm 선폭, 70 nm의 금속층 높이를 가지는 금속 격자 구조로 제작 되었다. 분석결과 600 nm 파장에서 80% 이상의 최고 투과율 및 $10^6$ 이상의 소광비를 가지는 나노 금속 격자 편광필름의 높은 광 특성을 확인하였다.

In this study, we demonstrate the change of optical characteristic by thickness of metal deposition on nano metal grid polarizer film fabrication. Nano metal grid polarizer film consists of aluminium grid polarizer layer on PET (Polyethylene phthalate) substrate. We aim at metal grid layer formation for the large nano wire grid polarizer fabrication. we draw process conditions of the nano metal grid polarizer film fabrication to improve transmittance and extinction ratio and Nano wire grid polarizer film (NWGP) film is fabricated with 140 nm pitch, 70 nm width, and 70 nm depth of metal grid on optimum design conditions. As a result, we get high optical properties of nano wire grid polarizer which is the maximum transmittance of 80% and the extinction ratio of $10^6$ at 600 nm wavelength respectively.

키워드

참고문헌

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피인용 문헌

  1. Fabrication of Monolithic Spectrometer Module Based on Planar Optical Waveguide Platform using UV Imprint Lithography vol.22, pp.3, 2015, https://doi.org/10.6117/kmeps.2015.22.3.073
  2. Enhancement in the extinction ratio of a wire grid polarizer in the mid-wavelength infrared range via hot electron diffused cold-annealing vol.578, pp.None, 2022, https://doi.org/10.1016/j.apsusc.2021.151965