한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제32권6호
  • /
  • Pages.571-576
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  • 2015
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  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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초정밀 유정압 테이블에서 냉각장치의 변수 설정이 온도특성에 미치는 영향

Influence of Parameter Setting in an Oil Cooler on the Temperature Characteristics of an Ultra-precision Hydrostatic Table

  • 김경호 (한국기계연구원 초정밀시스템연구실) ;
  • 김창주 (한국기계연구원 초정밀시스템연구실) ;
  • 오정석 (한국기계연구원 초정밀시스템연구실) ;
  • 박천홍 (한국기계연구원 초정밀시스템연구실)
  • Khim, Gyungho (Department of Ultra Precision Machines and Systems, Korea Institute of Machinery and Materials) ;
  • Kim, Chang Ju (Department of Ultra Precision Machines and Systems, Korea Institute of Machinery and Materials) ;
  • Oh, Jeong Seok (Department of Ultra Precision Machines and Systems, Korea Institute of Machinery and Materials) ;
  • Park, Chun Hong (Department of Ultra Precision Machines and Systems, Korea Institute of Machinery and Materials)
  • 투고 : 2014.10.20
  • 심사 : 2015.05.27
  • 발행 : 2015.06.01
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초록

Temperature characteristics of supply oil in an ultra-precision hydrostatic table are largely influenced by parameter setting in an oil cooler such as the location of reference sensor and cooling temperature. In this paper, influences of the parameter setting on the temperature variation in the hydrostatic table are experimentally analyzed to suggest the guidelines for practical application. In case of using temperature of inlet oil as a reference sensor in the oil cooler, temperature rise of the supply oil is smaller and thermal settling time is faster than that of using temperature of outlet oil as a reference sensor. The experimental results also show that temperatures of table, rail and return oil can be made almost same, and thermal settling time can be decreased by setting cooling temperature in the oil cooler to be lower than atmospheric temperature.

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참고문헌

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