Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on the Fabrication and Electrical Characteristics of Hydraulic Pressure Sensors by Using Ceramics Materials

세라믹소재를 이용한 해수압센서 제작 및 전기적 특성 연구

  • 박성현 (동의대학교 전기공학과) ;
  • 김은섭 ((주)미르알엔티 기술연구소) ;
  • 정정균 ((주)미르알엔티 기술연구소)
  • Received : 2015.05.18
  • Accepted : 2015.05.23
  • Published : 2015.06.01
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Abstract

In this paper, we fabricated ceramic body and sapphire wafer in order to develop a hydraulic pressure sensor with high sensitivity and high temperature stability. The sapphire wafer was adopted with a membrane of capacitance ceramic pressure sensor. The capacitance value of the sensor for the finite element analysis(FEM) showed a linear pressure characteristics. Membrane was processed with a diameter of 32.4 mm and a thickness of 1 mm by using alumina powders. Ceramic body was processed with a diameter 32.4 mm and a thickness 5 mm. The capacitance pressure sensor was made with high heat treatment of the ceramic body and the sapphire wafer. Initially capacitance of the pressure sensor was 50 pF and a capacitance of 110 pF was measured from 5 bar pressure. Output voltage of 5 V was appeared at 5 bar pressure.

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References

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