대한의용생체공학회:의공학회지 (Journal of Biomedical Engineering Research)

  • 제37권5호
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  • Pages.168-177
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  • 2016
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  • 1229-0807(pISSN)
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  • 2288-9396(eISSN)
대한의용생체공학회 (The Korean Society of Medical and Biological Engineering)
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Quatrz 웨이퍼의 직접접합과 극초단 레이저 가공을 이용한 체내 이식형 혈압센서 개발

Development of Implantable Blood Pressure Sensor Using Quartz Wafer Direct Bonding and Ultrafast Laser Cutting

  • 김성일 (국립한밭대학교 전자제어공학과) ;
  • 김응보 (국립한밭대학교 전자제어공학과) ;
  • 소상균 (국립한밭대학교 전자제어공학과) ;
  • 최지연 (한국기계연구원 광응용기계연구실) ;
  • 정연호 (국립한밭대학교 전자제어공학과)
  • Kim, Sung-Il (Department of Electronics and Control Engineering, Hanbat National University) ;
  • Kim, Eung-Bo (Department of Electronics and Control Engineering, Hanbat National University) ;
  • So, Sang-kyun (Department of Electronics and Control Engineering, Hanbat National University) ;
  • Choi, Jiyeon (Department of Laser & Electron Beam Application, Korea Institute of Machinery & Materials) ;
  • Joung, Yeun-Ho (Department of Electronics and Control Engineering, Hanbat National University)
  • 투고 : 2016.09.26
  • 심사 : 2016.11.12
  • 발행 : 2016.10.31
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초록

In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of $3mm{\times}15mm{\times}0.5mm$. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure.

키워드

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