한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제25권1호
  • /
  • Pages.75-82
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  • 2016
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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초정밀 듀얼 스테이지를 위한 고댐핑 저진동 제어기 개발

Development of Low-Vibration Controller for Ultra-Precision Dual Stage

  • Kang, Seok Il (Department of Mechanical System Design Eng., Seoul National University of Science & Technology) ;
  • Kim, Jung-Han (Department of Mechanical System Design Eng., Seoul National University of Science & Technology)
  • 투고 : 2015.12.08
  • 심사 : 2016.02.14
  • 발행 : 2016.02.15
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초록

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.

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참고문헌

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