Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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A study on the crystallinity of AlN single crystals by heat treatment

열처리에 따른 AlN 단결정의 결정성에 관한 연구

  • Kang, Seung-Min (International Graduate School of Design Convergence, Hanseo University)
  • 강승민 (한서대학교 국제디자인융합전문대학원)
  • Received : 2017.06.12
  • Accepted : 2017.06.15
  • Published : 2017.06.30
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Abstract

AlN single crystal was thermally treated at $1200^{\circ}C$ and $1500^{\circ}C$ in the ambient gas of nitrogen. AlN single crystal was obtained by sublimation growth process using by a facility having a growth part which was heated by RF (Radio Frequency) induction heating. In this report, the optical microscopic results taken from thermally treated AlN single crystal and FWHM (Full width of half maximum) measured by DCXRD (Double crystal X-ray Diffractometry) were reported.

고주파 유도 가열 장치를 이용하여 승화법으로 성장된 AlN 단결정을 질소 분위기 하에서 $1200^{\circ}C$와 $1500^{\circ}C$에서 열처리하였다. 열처리 후 단결정 시편들의 표면을 광학현미경으로 관찰하였으며, DCXRD(Double crystal X-ray Diffractometry)를 이용하여 FWHM(Full width of half maximum) 값을 측정하여 결정성의 변화를 평가하였다.

Keywords

References

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