Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Fabrication of porous titanium oxide-manganese oxide ceramics with enhanced anti-static and mechanical properties

우수한 대전방지 및 기계적 성질을 가지는 다공성 산화티탄-산화망간 세라믹스 제조

  • Yu, Dongsu (Icheon Branch, Korea Institution of Ceramic Engineering and Technology) ;
  • Hwang, Kwang-Taek (Icheon Branch, Korea Institution of Ceramic Engineering and Technology) ;
  • Kim, Jong-Young (Icheon Branch, Korea Institution of Ceramic Engineering and Technology) ;
  • Jung, Jong-Yeol (Icheon Branch, Korea Institution of Ceramic Engineering and Technology) ;
  • Baik, Seung-Woo (Maxtech Co. Ltd.) ;
  • Shim, Wooyoung (Department of Advanced Materials Science and Engineering, Yonsei University)
  • 유동수 (한국세라믹기술원 이천 분원) ;
  • 황광택 (한국세라믹기술원 이천 분원) ;
  • 김종영 (한국세라믹기술원 이천 분원) ;
  • 정종열 (한국세라믹기술원 이천 분원) ;
  • 백승우 ((주)맥테크) ;
  • 심우영 (연세대학교 신소재공학과)
  • Received : 2018.10.08
  • Accepted : 2018.11.15
  • Published : 2018.12.31
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Abstract

Recently, porous ceramic materials with anti-static performance are urgently needed for semiconductor and OLED/LCD display manufacturing industry. In this work, we fabricated porous titanium manganese oxide ceramics having the surface resistivity of $10^8-10^{10}$ ohm and enhanced mechanical strength by partial sintering method using nanosized titanium oxide. By addition of nano-sized titanium oxide in the matrix, neck formation between grains was strengthened, which remarkably increased flexural strength up to 170 MPa (@porosity: 15 %), 110 MPa (@porosity: 31 %), compared to 80 MPa (@porosity: 26 %) for pristine titanium manganese oxide ceramics. We evaluated the performances of our ceramics as air-floating module for OLED flexible display manufacturing devices.

최근 반도체, 디스플레이 제조장비용 세라믹소재로 대전방지 기능을 가지는 다공성 세라믹스가 시급히 요구되고 있다. 본 연구에서는 다공성 산화티탄-산화망간 기지상에 산화티탄 나노분말을 첨가하여 부분소결함으로써 $10^8-10^{10}$ ohm의 표면저항을 가지고 향상된 기계적 강도를 가지는 다공성 세라믹스를 제조하였다. 나노 크기의 산화티탄 분말을 첨가함으로써 입자 사이의 목 형성을 강화하였고, 그 결과 꺽임강도를 170 MPa(@기공률 15 %), 110 MPa(@기공률 31 %) 수준으로 증가시킬 수 있었다. 이는 P-25를 첨가하지 않았을 때의 꺽임강도(80 MPa @ 기공률 26 %)에 비하여 주목할만큼 증가한 값으로 단순한 기공률 감소가 아닌 목 형성등 미세구조 변화에 따른 것으로 판단된다. 개발 세라믹스를 적용한 OLED 유연소자 제조공정용 공기부상용 모듈을 제작하여 진공척의 성능을 평가하였다.

Keywords

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Fig. 1. (a) Air-floating device for OLED display manufacture. (b) A schematic of OLED deposition module using vacuum chucking and air-floating devices. In deposition process zone, air-floating is employed for fixing a substrate. For loading and supporting a substrate, vacuum chucking is used. (c) vacuum chucking device for LCD substrates.

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Fig. 3. FE-SEM images of TiO2-MnO (TMO) ceramics with 30 % P-25 sintered at (a) 1100℃, (b) 1200℃, (c) 1300℃.

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Fig. 4. FE-SEM images of TiO2-MnO (TMO) ceramics sintered at 1100℃ with (a) 30 % P-25, (b) 40 % P-25, (× 1,000 magnification), (c) 30 % P-25, (d) 40 % P-25, (× 3,000 magnification) (e) 30 % P-25, (f) 40 % P-25 (× 10,000 magnification).

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Fig. 5. FE-SEM images of TiO2-MnO (TMO) ceramics sintered at 1200℃ with (a) 30 % P-25, (b) 40 % P-25, (× 1,000 magnification), (c) 30 % P-25, (d) 40 % P-25, (× 3,000 magnification) (e) 30 % P-25, (f) 40 % P-25 (× 10,000 magnification).

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Fig. 6. Evolution of porosity of TMO ceramics according to amounts of P-25 and sintering temperature.

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Fig. 7. Evolution of flexural strength of TMO ceramics according to amounts of P-25 and sintering temperature.

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Fig. 8. Evolution of flexural strength of TMO ceramics as a function of porosity.

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Fig. 2. X-ray diffraction patterns for the sintered specimens of TiO2-MnO (P-25 30 %) sintered at (a) 1100℃ and (c) 1200℃. TiO2-MnO (P-25 40 %) (b) 1100℃, (d) 1200℃, and (e) 1300℃.

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Fig. 9. (a) Evolution of surface resistivity of TMO ceramics as a function of P-25 amount and sintering temperature. (b) A schematic of surface resistivity measurement. (c) A demonstration of air-floating using TMO ceramics.

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