한국재료학회지 (Korean Journal of Materials Research)

  • 제28권7호
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  • Pages.405-410
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  • 2018
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  • 1225-0562(pISSN)
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  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
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AIP법으로 증착된 TiN/CrN 다층박막의 특성 분석

Analysis of Properties Multi-Layered TiN/CrN Thin Films Deposited by AIP Method

  • 백민숙 (순천대학교 차세대전략산업용희유자원실용화센터) ;
  • 윤동주 (순천대학교 차세대전략산업용희유자원실용화센터) ;
  • 허기복 ((주)삼우ECO) ;
  • 김병일 (순천대학교 신소재공학과)
  • Baek, Min-Sook (Center for practical Use of Rare Materials, Sunchon National University) ;
  • Yoon, Dong-Joo (Center for practical Use of Rare Materials, Sunchon National University) ;
  • Heo, Ki-Bok (SAMWOO ECO., Ltd.) ;
  • Kim, Byung-Il (Department of New Materials Engineering, Sunchon National University)
  • 투고 : 2018.03.23
  • 심사 : 2018.06.10
  • 발행 : 2018.07.27
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초록

TiN and CrN thin films are among the most used coatings in machine and tool steels. TiN and CrN are deposited by arc ion plating(AIP) method. The AIP method inhibits the reaction by depositing a hard, protective coating on the material surface. In this study, the characteristics of multi-layer(TiN/CrN/TiN(TCT), CrN/TiN/CrN(CTC)) are investigated. For comparison, TiN with the same thickness as the multilayer is formed as a single layer and analyzed. Thin films formed as multilayers are well stacked. The characteristics of micro hardness and corrosion resistance are better than those of single layer TiN. The TiN/CrN peak is confirmed because both TCT and CTC are formed of the same component(TiN, CrN), and the phase is first grown in the (111) direction, which is the growth direction. However, the adhesion and abrasion resistance of the multilayer films are somewhat lower.

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