Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Analysis and Design of Si3N4 Rib-optical Waveguides for Evanescent-wave Integrated-optical Biosensors

소산파 집적광학 바이오센서에 적합한 Si3N4 립-광도파로 해석 및 설계에 관한 연구

  • Jung, Hongsik (Department of Electronics & Electrical Convergence Engineering, College of Science & Technology, Hongik University)
  • 정홍식 (홍익대학교 전자전기융합공학과)
  • Received : 2018.11.20
  • Accepted : 2018.12.14
  • Published : 2019.02.25
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Abstract

$Si_3N_4$ rib-optical waveguides for evanescent-wave integrated-optical biosensors were analytically interpreted, to derive the single-mode propagation conditions. The integrated-optical biosensor structure based on two-mode interference was proposed, and the rib width and thickness and core thickness for a single-mode and two-mode waveguide (sensing region) were proposed to be $3{\mu}m$, 2 nm, and 150 nm and $3{\mu}m$, 20 nm, and 340 nm respectively. The optical characteristics of each guided-wave mode were investigated utilizing the film mode-matching (FMM) analysis.

소산파 기반 집적광학 바이오센서에 적합한 $Si_3N_4$ 립-광도파로 구조에 대한 해석적 분석을 통해서 단일모드 도파조건을 도출하였다. 두-모드 간섭현상을 이용하는 집적광학 바이오센서 구조를 제시하고, 단일모드와 두-모드(감지영역)에 해당되는 립-광도파로 제원인 폭, 립 및 코어 두께 각각에 대해서 $3{\mu}m$, 2 nm, 150 nm와 $3{\mu}m$, 20 nm, 340 nm를 제안하였으며, FMM 전산해석을 통해서 감지영역의 두-모드들에 대한 광학적 특성들을 검토하였다.

Keywords

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Fig. 1. Cross-section of rib-optical waveguide for analytical inter-pretation.

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Fig. 2. Cross-section of Si3N4 rib-optical waveguide with refractive indices and dimension for computational optical-mode analysis.

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Fig. 3. Effective refractive indices as a function of rib-optical waveguide width for (a) T = 10 nm, (b) T = 20 nm, (c) T = 30 nm.

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Fig. 4. Effective refractive indices as a function of rib-optical waveguide thickness for (a) W = 3 µm, (b) W = 5 µm, (c) W = 10 µm.

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Fig. 5. Effective refractive indices as a function of rib-optical waveguide core thickness for (a) W = 4 µm, T = 2 nm (b) W = 10 µm, T =10 nm (c) W = 10 µm, T = 50 nm.

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Fig. 7. Effective refractive indices as a function of rib-optical waveguide width for TE00, TE01, and TE02 mode, respectively.

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Fig. 8. Effective refractive indices as a function of rib-optical waveguide (two-mode region) width for TE00, TE01, and TE02 mode, respectively.

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Fig. 11. Longitudinal cross-section with refractive-indices and layer thickness for proposed two-mode, integrated-optical biosensor utilizing Si3N4 rib-optical waveguides.

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Fig. 6. Schematic of an integrated-optic, evanescent-wave biosensor based on rib-optical waveguides and two-mode interferometer.

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Fig. 9. (a) Planar intensity distribution, (b) three-dimensional intensity distribution, (c) horizontal and (d) vertical distribution of Ex-field intensity for the fundamental-mode of two-mode, rib-optical waveguide.

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Fig. 10. (a) Planar intensity distribution, (b) three-dimensional intensity distribution, (c) horizontal and (d) vertical distribution of Ex-field intensity for the first high-order mode of two-mode, rib-optical waveguide.

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