Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Design of Diaphragm for Ultra High Pressure Sensors and Its performance Evaluation Using a PZT Actuated Deformation Tester

초고압 압력센서용 다이어프램 설계 및 PZT 구동 변형시험기를 이용한 성능평가

  • Yun, Dae Jhoong (School of Mechtronical Engineering, Pusan National Unversity) ;
  • Ahn, Jung Hwan (School of Mechtronical Engineering, Pusan National Unversity)
  • Received : 2018.11.21
  • Accepted : 2019.01.29
  • Published : 2019.01.31
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Abstract

This research aims at designing a diaphragm made of SUS316L stainless steel for ultra high pressure sensors and evaluating its performance with a PZT driven deformation tester instead of high pressure chamber testing up to 100 MPa. Finite element method analysis indicates that the optimum thickness of a flat diaphragm is 1.5 mm not only to secure safety of sensors up to 100 MPa but also to enhance displacement measuring sensitivity. For this thickness, the maximum displacement at the center of the diaphragm is $5.3{\mu}m$. The PZT actuator must offer a force of 1,669 N to create a pressure of 100 MPa at the diaphragm surface in order to obtain a displacement of $5.3{\mu}m$. The performance evaluation by the PZT driven tester demonstrates nearly the same results as the same results as the sensors tested in the ultra high pressure chamber.

Keywords

HSSHBT_2019_v28n1_58_f0001.png 이미지

Fig. 1. Notch type diaphragm ; (a) Design of notch type diaphragm, (b) Background theory of design [12].

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Fig. 2. Flat type diaphragm ; (a) Design of flat type diaphragm, (b) Background theory of design.

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Fig. 3. FEM analysis result of Notch type diaphragm.

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Fig. 4. FEM analysis result of Flat type diaphragm.

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Fig. 5. Pressure sensor performance evaluation tester.

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Fig. 6. Design of Pressure input device.

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Fig. 7. Output force measuring device of PZT.

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Fig. 8. PZT output force according to voltage.

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Fig. 9. Deformation sensor performance tester.

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Fig. 10. Deformation of each sensor according to pressure.

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Fig. 11. Deformation measuring test in pressure chamber.

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Fig. 12. Deformation measuring value in each tester.

Table 1. Deformation according to notch thickness (diaphragm thickness : 20 mm)

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Table 2. Deformation according to diaphragm thickness

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Table 3. Deformation according to diaphragm thickness

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Table 4. Deformation according to measuring diameter

HSSHBT_2019_v28n1_58_t0004.png 이미지

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