Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Effect of Measuring Method on the Evaluation of Piezoelectric and Dielectric Properties of PMN-PT Single Crystal

PMN-PT 단결정의 압전 및 유전 특성 평가에 미치는 측정 방법의 영향

  • Kim, Yong Soo (Department of Electronic Engineering, Korea National University of Transportation) ;
  • Park, Jae Hwan (Department of Electronic Engineering, Korea National University of Transportation) ;
  • Lee, Jeongho (Ibule Photonics) ;
  • Lee, Sang Goo (Ibule Photonics)
  • 김용수 (한국교통대학교 전자공학과) ;
  • 박재환 (한국교통대학교 전자공학과) ;
  • 이정호 ((주)아이블포토닉스) ;
  • 이상구 ((주)아이블포토닉스)
  • Received : 2019.12.02
  • Accepted : 2019.12.22
  • Published : 2019.12.30
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Abstract

The influence of measuring fixtures on the measurement of dielectric and piezoelectric properties of PMN-PT single crystal specimens was investigated. As the pressure of the jig pin which applied the AC electrical signal to the sample decreased, the lower resonance resistance was measured and the higher mechanical quality factor was calculated. The mechanical quality factor was 418 when the spring tension of the jig pin was 20grf, and the value of the quality factor was reduced by half when the spring tension was 200grf. The 4-probe fixture method is unsuitable for measuring piezoelectric properties, but it was suitable for the measurement of dielectric loss. In order to accurately evaluate the piezoelectric properties of PMN-PT, it is necessary to lower the spring tension of the jig pin as much as possible.

PMN-PT 단결정 시편의 유전 및 압전 특성의 측정 결과에 미치는 측정 기구물의 영향을 고찰하였다. 샘플에 교류 전기신호를 인가하는 지그핀의 압력이 감소할수록 공진저항은 낮게 측정되고 기계적 품질계수는 높게 계산되었다. 지그핀의 스프링 텐션이 20 grf인 경우 기계적 품질계수는 418으로 측정되었고, 스프링 텐션이 200 grf인 경우 품질계수 값은 절반으로 감소하였다. 4-프로브 방식의 픽스쳐는 압전특성 측정에는 부적합하지만 유전손실 값의 측정에는 가장 적합하였다. 정확한 PMN-PT의 압전특성 평가를 위하여 지그핀의 스프링 텐션을 최대한 낮추는 것이 필요하며, 정확한 유전특성의 평가를 위하여 4-프로브 방식이 적합함을 알 수 있다.

Keywords

References

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