Journal of the Korea Institute of Information and Communication Engineering (한국정보통신학회논문지)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Improvement of Mass Spectral Detection Performance by Pre-correction of Peak Position Error

피크위치오차 사전 보정을 통한 질량 스펙트럼 검출 성능 개선

  • Lee, Young Hawk (Department of Education, Dongeui University) ;
  • Heo, Gyeongyong (Department of Electronic Engineering, Dongeui University) ;
  • Choi, Hun (Department of Electronic Engineering, Dongeui University)
  • Received : 2019.04.08
  • Accepted : 2019.04.19
  • Published : 2019.06.30
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Abstract

In the mass spectrum of the mass spectrometer, the spectrum of the low peak adjacent to the spectrum having the high peak value is connected to each other and thus the separation is difficult. This inter-spectral overlap causes degradation of the mass spectral detection performance and resolution. In this paper, we propose a method to improve the mass spectrum detection performance and peak accuracy of residual gas analyzer. The type discrimination according to the characteristics of the ion signal block and the pre-correction for the peak position error can separate and detect the spectrum of the low peak connected to the adjacent spectra. To verify the performance of the proposed method, we compared the proposed method with the conventional method in simulations using actual ion signals obtained from the mass spectrometer under development.

질량 분석기의 질량 스펙트럼에서 높은 피크값을 갖는 스펙트럼에 인접한 낮은 피크값의 스펙트럼은 서로 연결되어 분리가 어렵다. 이러한 스펙트럼간 겹칩은 질량 스펙트럼의 검출 성능과 해상도를 저하시키는 원인이 된다. 본 논문에서는 잔류 가스 분석기의 질량 스펙트럼 검출 성능과 피크값의 정확도를 향상시키는 방법을 제안한다. 이온 신호블록의 특성에 따른 유형 판별과 피크위치오차에 대한 사전 보정은 인접한 스펙트럼에 연결된 낮은 피크값의 스펙트럼 분리 및 검출할 수 있다. 제안된 방법의 성능을 확인하기 위해 질량분석기에서 얻은 실제 이온 신호를 사용하여 제안한 방법과 기존 방법을 비교하였다.

Keywords

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Fig. 1 Algorithm flowchart of the conventional method [6]

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Fig. 2 Results of the main steps in the conventional method

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Fig. 3 Linear and quadratic fitting characteristics for ideal mass spectrum and noise

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Fig. 4 Ion signals of SF6 as input

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Fig. 5 Configuration of signal blocks, PPE pre-correction, and result of the estimated Peak in the conventional method (k = 90)

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Fig. 6 Configuration of signal blocks, PPE pre-correction, and result of the estimated Peak in the proposed method (k = 90)

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Fig. 7 The mass spectrum of SF6 improved by the proposed method, (a) ion signals of residual gas used as input, (b) result of mass spectrum by the conventional method, (c) result of mass spectrum by the proposed method

Table. 1 Type and features of signal block corresponding to mass index by quadratic curve fitting results

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Table. 2 Selected ion signals for pre-correction of peak position error

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Table. 3 Condition for eliminating the invalid element signal of the signal block

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