Design & Manufacturing

Korean Society of Die & Mold Engineering (한국금형공학회)
권호 표지

A study on the fabrication and processing of ultra-precision diamond tools using FIB milling

FIB milling을 이용한 고정밀 다이아몬드공구 제작과 공정에 관한 연구

  • Wi, Eun-Chan (Department of Mechanical Convergence Engineering, Induk University) ;
  • Jung, Sung-Taek (Department of Mechanical Convergence Engineering, Induk University) ;
  • Kim, Hyun-Jeong (Department of Mechanical Convergence Engineering, Induk University) ;
  • Song, Ki-Hyeong (IT Converged Process R&D Group, Korea Institute of Industrial Technology) ;
  • Choi, Young-Jae (IT Converged Process R&D Group, Korea Institute of Industrial Technology) ;
  • Lee, Joo-Hyung (Department of Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Baek, Seung-Yup (Department of Mechanical Convergence Engineering, Induk University)
  • 위은찬 (인덕대학교 융합기계공학과) ;
  • 정성택 (인덕대학교 융합기계공학과) ;
  • 김현정 (인덕대학교 융합기계공학과) ;
  • 송기형 (한국생산기술연구원 IT융합공정그룹) ;
  • 최영재 (한국생산기술연구원 IT융합공정그룹) ;
  • 이주형 (서울과학기술대학교 기계설계로봇공학과) ;
  • 백승엽 (인덕대학교 융합기계공학과)
  • Received : 2020.06.18
  • Accepted : 2020.06.30
  • Published : 2020.06.30
Download PDF
⟨ Previous Next ⟩

Abstract

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

Keywords

Acknowledgement

본 연구는 기계산업핵심기술개발사업 "고정밀 광학부품용 가공기 및 초정밀 Grooving 머신실증" 과제번호(20007244) 연구비 지원으로 진행되었습니다. 이에 감사를 드립니다.

References

  1. Chen, S. T., Tsai, M. Y., Lai, Y. C., & Liu, C. C., "Development of a micro diamond grinding tool by compound process", Journal of Materials Processing Technology, 209(10), pp. 4698-4703, 2009. https://doi.org/10.1016/j.jmatprotec.2008.10.055
  2. Cheng, J., & Gong, Y. D., "Experimental study on ductile-regime micro-grinding character of soda-lime glass with diamond tool", The International Journal of Advanced Manufacturing Technology, 69(1-4), pp. 147-160, 2013. https://doi.org/10.1007/s00170-013-5000-3
  3. Kawasegi, N., Ozaki, K., Morita, N., Nishimura, K., & Yamaguchi, M., "Development and machining performance of a textured diamond cutting tool fabricated with a focused ion beam and heat treatment", Precision Engineering, 47, pp. 311-320, 2017. https://doi.org/10.1016/j.precisioneng.2016.09.005
  4. Choi, W. K., & Baek, S. Y., "Study on Platinum Coating Depth in Focused Ion Beam Diamond Cutting Tool Milling and Methods for Removing Platinum Layer", Materials, 8(9), pp. 6498-6507, 2015. https://doi.org/10.3390/ma8095317
  5. Baek, S. Y., Choi, W. K., Choi, Y. J., & Lee, E. S., "Controllability Study of Single-Crystal Diamond Cutting Tool Focus Ion Beam Milling with Different Beam Current and Tilting Angle", In Advanced Materials Research (Vol. 1136, pp. 430-434). Trans Tech Publications Ltd, 2016. https://doi.org/10.4028/www.scientific.net/AMR.1136.430
  6. Baek, S. Y., Chu, J. H., & Jung, S. T., "A Study on Fabrication of Ultra-Precision Diamond Tool and Length Optimization for Improving the Stability", In Key Engineering Materials (Vol. 777, pp. 289-293). Trans Tech Publications Ltd, 2018. https://doi.org/10.4028/www.scientific.net/KEM.777.289
  7. Hang-Eun Joe, Eun-Goo Kang, Martin B. G. J., "A Review of State of the Art of Electron Beam and Ion Beam Machining", Journal of the Korean Society for Precision Engineering, 35(3), pp. 241-252, 2018. https://doi.org/10.7736/kspe.2018.35.3.241
  8. Orloff, J., Utlaut, M., Swanson, L., & Wagner, A., "High resolution focused ion beams: FIB and its applications", Physics Today, 57(1), pp. 54-55, 2004. https://doi.org/10.1063/1.1650073