대한임베디드공학회논문지 (IEMEK Journal of Embedded Systems and Applications)

대한임베디드공학회 (Institute of Embedded Engineering of Korea)
권호 표지
DOI QR코드

DOI QR Code

마스크 생산 라인에서 영상 기반 마스크 필터 검사를 위한 계층적 상관관계 기반 이상 현상 탐지

Hierarchical Correlation-based Anomaly Detection for Vision-based Mask Filter Inspection in Mask Production Lines

  • 투고 : 2021.09.23
  • 심사 : 2021.12.02
  • 발행 : 2021.12.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper addresses the problem of vision-based mask filter inspection for mask production systems. Machine learning-based approaches can be considered to solve the problem, but they may not be applicable to mask filter inspection if normal and anomaly mask filter data are not sufficient. In such cases, handcrafted image processing methods have to be considered to solve the problem. In this paper, we propose a hierarchical correlation-based approach that combines handcrafted image processing methods to detect anomaly mask filters. The proposed approach combines image rotation, cropping and resizing, edge detection of mask filter parts, average blurring, and correlation-based decision. The proposed approach was tested and analyzed with real mask filters. The results showed that the proposed approach was able to successfully detect anomalies in mask filters.

키워드

과제정보

이 연구는 2019년 국립대학 육성사업비로 지원되었음.

참고문헌

  1. G. Wang, Y. Wang, H. Li et al., "Morphological Background Detection and Illumination Normalization of Text Image with Poor Lighting," PLoS ONE, Vol. 9, No. 11, pp. 1-22, 2014.
  2. J. Y. Gil, R. Kimmel, "Efficient Dilation, Erosion, Opening, and Closing Algorithms," IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 24, No. 12, pp. 1606~1617, 2002. https://doi.org/10.1109/TPAMI.2002.1114852
  3. S. Belfkih, P. Montesinos, R. Beuscart, "Edge Detection Using on Partial Differential Equation and Anisotropic Diffusion," Proceedings of the International Symposium on Signal Processing and Its Applications, Vol. 1, pp. 553-556, 2003.
  4. C. Xiansheng, "An Edge Detection new Algorithm Based on Laplacian Operator," Proceedings of the IEEE International Conference on Communication Software and Networks, pp. 202-206, 2011.
  5. Jihun Kim, Daesik Lee, Minho Lee, "Lane Detection System Using CNN," Journal of embedded systems and applications, Vol. 11, No. 3, pp. 163-171, 2016. https://doi.org/10.14372/IEMEK.2016.11.3.163
  6. D. S. Prabha, J. S. Kumar, "Performance Analysis of Image Smoothing Methods for low Level of Distortion," Proceedings of the IEEE International Conference on Advances in Computer Applications, pp. 372-376, 2016.
  7. I. Hussai, T. R. Reed, "Segmentation-based Nonlinear Image Smoothing," Proc. International Conference on Image Processing, Vol. 2, pp. 507-511, 1994.
  8. M. C. Pan, A. H. Lettington, "Smoothing Images by a Probability Filter," Proceedings of the IEEE International Joint Symposia on Intelligence and Systems, pp. 343-346, 1998.
  9. D. M. Tsai, C. T. Lin, "Fast Normalized Cross Correlation for Defect Detection," Pattern Recognition Letters, Vo. 24, No. 15, pp. 2625-2631, 2003. https://doi.org/10.1016/S0167-8655(03)00106-5
  10. A. K. R. Mujahid, C. Thirumalai, "Pearson Correlation Coefficient Analysis on Adenoma Carcinoma Cancer," Proceedings of the International Conference on Trends in Electronics and Informatics, pp. 492-495, 2017.
  11. D. M. Tsai, C. T. Lin, "Fast Normalized Cross Correlation for Defect Detection," Pattern Recognition Letter, Vol. 24, No. 15, pp. 2625-2631, 2003. https://doi.org/10.1016/S0167-8655(03)00106-5
  12. M. G. Kim, S. C. Kim, "Visual Object Tracking Using Inter-frame Correlation of Convolutional Feature maps," Journal of Embedded Systems and Applications, Vol. 11, No. 4, pp. 219-225, 2016. https://doi.org/10.14372/IEMEK.2016.11.4.219
  13. M. H. Annaby, Y. M. Fouda, M. A. Rushdi, "Improved Normalized Cross-correlation for Defect Detection in Printed-circuit Boards," IEEE Transactions on Semiconductor Manufacturing, Vol. 32, No. 2, pp. 199-211, 2019. https://doi.org/10.1109/tsm.2019.2911062
  14. C. Wang, B. C. Jiang, J. Lin, C. Chu, "Machine Vision-based Defect Detection in IC Images Using the Partial Information Correlation Coefficient," IEEE Transactions on Semiconductor Manufacturing, Vol. 26, No. 3, pp. 378-384, 2013. https://doi.org/10.1109/TSM.2013.2261566