Acknowledgement
이 논문은 정부(과학기술정보통신부)의 재원으로 한국연구재단-차세대지능형반도체기술개발(소자)사업 지원을 받아 수행된 연구임[연구과제명: 저온 공정 산화물 반도체 기반 초저전력 단일3차원 집적 로직 소자 및 아키텍쳐 개발(NRF-2020M3F3A2A01085791)].
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