Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Study on the Structural Design of an Ultra-miniaturized Microcolumn with a Built-in Electrostatic Octupole Stigmator

정전형 8중극 비점수차 보정기가 내장된 극초소형 마이크로컬럼의 구조 설계 연구

  • Tae Sik Oh (Department of Display & Semiconductor Engineering, College of Engineering, Sunmoon University)
  • 오태식 (선문대학교 공과대학 디스플레이반도체공학과)
  • Received : 2023.08.03
  • Accepted : 2023.09.12
  • Published : 2023.09.30
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Abstract

We designed a novel ultra-miniaturized microcolumn structure having an stigmator to significantly improve throughput per unit time, which is the biggest disadvantage of microcolumns. We adopted the structure of the stigmator in the form of an electrostatic octupole electrode, and used an electrostatic quadrupole deflector with a relatively simple structure considering the increase in wiring due to the introduction of the stigmator. We have dramatically reduced the effect of astigmatism that occurs when the electron beam probe is scanned to the periphery of the target by introducing the stigmator between the control electrode and the deflector. As our numerical analysis simulation results, the field of view obtained as a result of this study is about 46.3% improved compared to our previous study, and the electron beam probe size of less than 10 nm was achieved in the entire field of view.

Keywords

References

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