한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제37권2호
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  • Pages.164-168
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  • 2024
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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서미스터 소자로의 응용을 위한 솔-젤법으로 제작한 (La0.7Sr0.3)(Mn1-xFex)O3 박막의 구조적, 전기적 특성

Structural and Electrical Properties of (La0.7Sr0.3)(Mn1-xFex)O3 Thin Films Prepared by Sol-Gel Method for Thermistor Devices

  • 육지수 (경상국립대학교 나노신소재융합공학과 그린에너지융합연구소) ;
  • 이삼행 (경상국립대학교 나노신소재융합공학과 그린에너지융합연구소) ;
  • 이명규 (경상국립대학교 나노신소재융합공학과 그린에너지융합연구소) ;
  • 박주석 (한국세라믹기술원 기업지원본부) ;
  • 김영곤 (조선이공대학 전자과) ;
  • 이성갑 (경상국립대학교 나노신소재융합공학과 그린에너지융합연구소)
  • Ji-Su Yuk (Research Institute for Green Convergence Technology, Department of Materials Engineering and Convergence Technology, Gyeongsang National University) ;
  • Sam-Haeng Yi (Research Institute for Green Convergence Technology, Department of Materials Engineering and Convergence Technology, Gyeongsang National University) ;
  • Myung-Gyu Lee (Research Institute for Green Convergence Technology, Department of Materials Engineering and Convergence Technology, Gyeongsang National University) ;
  • Joo-Seok Park (Business Support Division, Korea Institute of Ceramic Engineering and Technology) ;
  • Young-Gon Kim (Department of Electronics, Chosun College of Science and Technology) ;
  • Sung-Gap Lee (Research Institute for Green Convergence Technology, Department of Materials Engineering and Convergence Technology, Gyeongsang National University)
  • 투고 : 2023.11.07
  • 심사 : 2023.11.29
  • 발행 : 2024.03.01
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초록

(La0.7Sr0.3)(Mn1-xFex)O3 (LSMFO) (x = 0.03, 0.06, 0.09, 0.12) precursor solution are prepared by sol-gel method. LSMFO thin films are fabricated by the spin-coating method on Pt/Ti/SiO2/Si substrate, and the sintering temperature and time are 800℃ and 1 hr, respectively. The average thickness of the 6-times coated LSMFO films is about 181 to 190 nm and average grain size is about 18 to 20 nm. As the amount of Fe added in the LSMFO thin film increased, the resistivity decreased, and the TCR and B25/65-value increased. Electrical resistivity, TCR and B25/65-value of the (La0.7Sr0.3)(Mn0.88Fe0.12)O3 thin film are 0.0136 mΩ-cm, 0.358%/℃, and 328 K at room temperature, respectively. The resistivity properties of LSMFO thin films matched well with Mott's VRH model.

키워드

과제정보

This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (2020R1A6A1A03038697). This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (2021R1I1A3052426), and the Technology Innovation Program (20020478, Development of commercial reference materials for chemical composition of nano-grade aluminum oxide for rechargeable battery separator coating) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea).

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