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Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology

  • 기타

Domain

  • Electricity/Electronics ＞ Semiconductor Device/System
  • Electricity/Electronics ＞ Display

2008.05a

  1. Mun, Ju-Tae 3
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  2. Sin, Tae-Ho 5
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  3. Son, Jong-Won 15
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  4. Kim, Jeong-Tae 23
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    - High Density Plasma Source-CCP-Dual/Triple, RF Frequency Control - Radical/Flux Analysis - Low Pressure Process - Chamber Design (Process gap/Wall gap) - Chamber Temp. Control. - ESC Dielectric Materials - Uniform Gas Injection
  5. Kim, Seung-Gi 31
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  6. Cha, Dong-Hyeong 39
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  7. Jang, Hong-Yeong 41
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  8. Hwang, Chang-Su;Kim, Jong-Uk;Kim, Min-Seok;Lee, In-Hwan;Lee, Yeong-Sim;Park, Yong-Heon;Kim, Hong-Bae 43
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