• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.198-201
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• 2006

In this paper, we fabricated drag force type and pressure difference type gas flow sensor with dry etching technology which used Deep RIE(reactive ion etching) and etching stop technology which used SOI(silicon-on-insulator). we fabricated four kinds of sensor, which are cantilever, paddle type, diaphragm, and diaphragm with orifice type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03mV/V kPa. Sensitivity of the fabricated diaphragm and diaphragm with orifice type sensor were relatively high as about 3.5mV/V kPa, 1.5mV/V kPa respectively.

• Journal of Mechanical Science and Technology
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• v.16 no.6
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• pp.776-784
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• 2002

We have performed experimental studies for the improvements of pneumatic brake systems of freight trains. Currently, most of the freight trains operated by the Korean National Railroad have either empty-load or diaphragm type brake systems. In this study, appropriate methods that the air pressure characteristics in both type of brake systems are in accordance with each other have been investigated. We have also performed running tests using a 30 car-train set to design optimum capacity of a quick release valve. The test results show that the quick release valve is considerably effective in shortening the release time of the diaphragm type brake system. In the case of a normal brake application, the diaphragm type brake system with the quick release valve reduces the release time to 34% of that of the system without the quick release valve. This release time is almost equivalent to that of the empty-load type brake system. Accordance of braking performance in different types of brake systems in a train set is expected to prevent wheel flats and to reduce maintenance costs.

• Korean Journal of Materials Research
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• v.21 no.7
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• pp.403-409
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• 2011

Micro speakers are used to reproduce sound in small electric and information and communications devices, such as cellular phones, PMPs, and MP3 players. The acoustical properties and sound quality, which are changed due to the decreased size of the speaker, are often adjusted varying the type and thickness of the diaphragm. The most widely used diaphragm material is thin polymer. It was previously reported by the author of this paper that the resonance frequency of a micro speaker is changed by the type and thickness of a polymer diaphragm. In this paper, the frequency response near the resonance frequency of a micro speaker was studied as functions of the type and thickness of the polymer diaphragm. While $R_{max}$ and $R_{DC}$ were affected by the type and thickness, an analysis of the electrical impedance curve revealed that $R_o(= R_{max}/R_{DC})$ and ${\Delta}f$ were not changed. Thus, $Q_{TS}$ which was function of $R_o$, ${\Delta}f$, and the resonance frequency, is only related to the resonance frequency. The increase of the resonance frequency led to a proportional rise of $Q_{TS}$. The change of the frequency response near the resonance frequency was not dependent on the type or thickness of the polymer diaphragm, but was affected by the resonance frequency.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.3
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• pp.55-59
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• 2018

In this paper, we investigated the characteristics of shear stress type piezoresistor on a diaphragm structure formed by MEMS (Microelectromechanical System) technology of silicon-direct-bonding (SDB) wafers with Si/$SiO_2$/Si-sub. The diaphragm structure formed by etching the backside of the wafer using a TMAH aqueous solution can be used for manufacturing various sensors. In this study, the optimum shape condition of the shear stress type piezoresistor formed on the diaphragm is found through ANSYS simulation, and the diaphragm structure is formed by using the semiconductor microfabrication technique and the shear stress formed by boron implantation. The characteristics of the piezoelectric resistance are compared with the simulation results. The sensing diaphragm was made in the shape of an exact square. It has been experimentally found that the maximum shear stress for the same pressure at the center of the edge of the diaphragm is generated when the structure is in the exact square shape. Thus, the sensing part of the sensor has been designed to be placed at the center of the edge of the diaphragm. The prepared shear stress type piezoresistor was in good agreement with the simulation results, and the sensitivity of the piezoresistor formed on the $2200{\mu}m{\times}2200{\mu}m$ diaphragm was $183.7{\mu}V/kPa$ and the linearity of 1.3 %FS at the pressure range of 0~100 kPa and the symmetry of sensitivity was also excellent.

• Aerospace Engineering and Technology
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• v.13 no.2
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• pp.160-166
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• 2014

The shutoff valve of a Liquid Rocket Engines (LRE) controls the flow of propellant between turbo-pump and combustion devices of LRE using pilot pressure and spring force. The shutoff valve is closed when the pilot pressure is removed from the diaphragm type actuator. During designing process of life cycle is when should be analyzed according to the characteristics of forces with respect to the opening and closing of diaphragm actuator. A valve has been designed to adjust the control pressure which is required to open a poppet and to determine the working fluid pressure at which a valve starts to close. During flow capacity test under room temperature as a part of life cycle tests, the leakage in diaphragm was occurred due to the leakage of sheet welding sections. The operating cycle of the diaphragm type actuator is about 61 times with 22 MPa of pilot pressure.

• Electrical & Electronic Materials
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• v.10 no.10
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• pp.1022-1028
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• 1997

In this paper we present the construction details and output characteristics of a diaphragm-type pressure sensor with Cu-Ni(53:47) thin-film strain gauges. In order to improve the sensitivity and the temperature compensation two circumferential gauges are placed near the center of the diaphragm and two radial gauges are located near the edge. For all the gauges the relative change in resistance ΔR/R with pressure is of the order 10$^{-3}$ for the maximum pressure. The output is found to be linear over the entire pressure range(0-30kfg/cm$^2$)and the output sensitivity obtained is 1.6mV/V. The maximum nonlinearity observed in output characteristics is 0.35%FS for 5V excitation and the hysteresis is less than 0.1%FS.

• Journal of the Korean Society for Precision Engineering
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• v.7 no.2
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• pp.58-64
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• 1990

As the miniature load cells have small inner space and sensing elements of which are thin and very sensitive to manufacturing conditions, it is very difficult to predict the rated outputs and control them by using the compensation resistor. The very useful equation has been derived for calculation of theoretical rated outputs for diaphragm type miniature load cells when commercial diaphragm strain gages are used. Four diaphragm type miniature load cells of which capacities are from 300 N to 1, 000 N and outer diameters are 20 mm and 26.5 mm are manufactured. The differences between calculating results and actural ones are less than 5%. According to numerical analysis the decrease of rated outputs caused to main error is examined in existence of loading button.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.513-514
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• 2009

• Journal of the Korean Society of Safety
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• v.21 no.1 s.73
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• pp.114-119
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• 2006

In this study, laminated composite umbrella type roofs structures such as stadium, exhibition, auditorium and museum are analyzed. These structures have not been dealt with so far because of the difficulty in modeling. These have been analyzed mostly by a simplified method or a grid analysis in design. In this study, better results can be obtained by using shell element. The behavior of umbrella type shell roof under self weight is analyzed for various parameters such as the influence of diaphragm, diaphragm type, ${\gamma}-angle$ type, height/chord ratio of segment, slope of roofs, number of conical segment and subtended angle.

• Proceedings of the Korean Geotechical Society Conference
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• 2010.03a
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• pp.14-25
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• 2010

The Yi Sun-Sin grand bridge is the suspension bridge which connects Myodo and Gwangyang. It is over the main navigation channel of Gwangyang Harbor. South anchorage(AN1, Myodo side) of the bridge is designed as rock anchored type. It sustains using the resistance of the underground rock's mass in Myodo. As this type of anchorage can minimize the exposure of the structure, It is economically efficient and environmentally friendly. North anchorage (AN2, Gwangyang side) is designed as the gravity type. This anchorage is 68 meters in diameter and use its own weight to support. Instead of normal rectangular diaphragm wall, the circular shape diaphragm wall is adopted to the north anchorage. It doesn't need to use internal temporary facilities, so it can significantly improve the constructability of the structure.