한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

광 도파로 제작을 위한 양자 교환 방식에 관한 연구

A study of proton exchange method for optical waveguide fabrication

  • 윤형도 (명지대학교 전자공학과) ;
  • 채기병 (명지대학교 전자공학과) ;
  • 강기성 (상지전문대학 전자과) ;
  • 소대화 (명지대학교 전자공학과)
  • 발행 : 1992.11.07
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this study, a single optical modulator which is fabricated on X-cut $LiNbO_3$ substrate by using proton exchange method is described. It is well-known that the proton exchange method is characterized by index change of the single optical modulator. As a results, it is found that the single optical waveguide varied widely with controlling diffusion process. The diffusion process was used to optimize the fabrication of the single optical modulator. On the other hand, the process was used to provide another performance improvement and it reduced the fabrication process.

키워드