대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
- /
- Pages.261-263
- /
- 1993
자화된 플라즈마의 특성 및 식각에의 응용
The characteristics of Magnetized plasma and its applications to Etching
- Shin, Kyoung-Sop (Department of Electrical Engineering, Seoul National University) ;
- Lee, Ho-Jun (Department of Electrical Engineering, Seoul National University) ;
- Whang, Ki-Woong (Department of Electrical Engineering, Seoul National University)
- 발행 : 1993.11.26
초록
The effects of the magnetic field and gas pressure on the etching characteristics were investigated in the axial magnetic field enhanced RIE system. This system has many advantages compared with the conventional RIE system ; the capability of operating at low pressure, low self-bias voltage, high electron density and high etch rate in the low pressure, but also has disadvantages such as the nonconformity of plasma density which intensifies as the magnitude of magnetic field increases. To overcome this problem we made some grooved anode and tried to find the optimal pressure and B-field strength.
키워드