한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1994년도 춘계학술대회 논문집
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- Pages.145-146
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- 1994
마이크로머신을 위한 SOI 기술
A SOI Technology for Micromachining
초록
A SOI technology is promising for micromachining: high temperature operation, the fabrication easiness of sophisticated and 3D microstructures, radiation hardness, integrated sensors etc. This paper describes reviews of SOI technologies, and their applications microsensors and microactuators
키워드