Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Structural and Dielectric Properties of the (Ba, Sr)$TiO_3$ Thin Film by Sol-Gel method

Sol-Gel법으로 제조한 (Ba, Sr)$TiO_3$ 박막의 구조 및 유전특성에 관한 연구

  • 김경덕 (광운대학교 전자재료공학과) ;
  • 류기원 (여주전문대학 전자과) ;
  • 배선기 (시립 인천대학교 전기공학과) ;
  • 이영희 (광운대학교 전자재료공학과)
  • Published : 1997.07.21
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Abstract

In this study, Sol-Gel derived $Ba_{0.7}Sr_{0.3}TiO_3$ (BST(70/30)) thin films were investigated. The stock solution of BST were fabricated and spin-coated on the Pt/Ti/$SiO_2$/Si and ITO/glass substrates. The coated specimen were dried at $300^{\circ}C$ and finally annealed at $650{\sim}750^{\circ}C$. To analyse crystallization condition and microstructural morphology for different substrates, XRD, and SEM analysis were processed. In the BST(70/30) composition. dielectric constant and loss characteristics measured at 1kHz were 173, 0.01% for Pt/Ti/$SiO_2$/Si substrates and 181, 0.019% for ITO/glass substrates, respectively.

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